Honeywell International Inc.

Honeywell G.m.b.h.

David K Arch

Mark W Weber

Burgess R Johnson

Max C Glenn

William P Platt

R Andrew Wood

M Walter Scott

Darryl Lyle Smith

Leonard R Weisberg

A method for providing micro-electromechanical systems (MEMS) devices with multiple motor frequencies and uniform motor-sense frequency separation is described. The devices each include at least one proof mass, each proof mass being connected to a substrate by a system of suspensions. The method includes controlling the resonant frequencies of the MEMS device by adjusting at least two of a mass of the proof masses, a bending stiffness of the proof masses, a length of the suspensions, and a width of the suspensions.

Methods and systems for simultaneously fabricating multi-frequency MEMS devices

An improved electromagnetic radiation-sensitive semiconductor device together with a method of making same is disclosed in which surface regions directly beneath the active portion of the electrical contacts are provided with a layer of semiconductor material having a higher bandgap than the radiation sensitive material which repels minority carriers but allows the passage of majority carriers. Because the rate of annihilation of minority carriers at the contact to which they are attracted is reduced, the responsivity of the detector is greatly enhanced.

Electromagnetic radiation detectors

Growing community of inventors

Bloomington, MN, United States of America

David K Arch