Mapper Lithography IP B.v.

David Johannes Van Den Bergen

Johan Joost Koning

The invention relates to a target processing unit () comprising a vacuum chamber () for accommodating a target to be processed, a projection column () within the vacuum chamber for generating a beam and projecting the beam towards the target, and a first conduit arrangement () for connecting the projection column to external equipment (). The vacuum chamber can comprise a positioning system () for supporting the target, and a second conduit arrangement () distinct from the first conduit arrangement for connecting the positioning system to external equipment, wherein the positioning system is moveably arranged with respect to the projection column, and wherein the positioning system and the projection column occupy spatially distinct portions of the vacuum chamber. The first conduit arrangement extends through an upper side of the vacuum chamber, and the second conduit arrangement extends through a lower side of the vacuum chamber.

Target processing unit

The invention relates to a projection lens assembly for directing a beam toward a target. This assembly includes a lens support body () that spans a plane (P), and has a connection region () and a lateral edge (). The lens support body is arranged for insertion into a frame () of a processing unit along an insertion direction (X) parallel with the plane (P). The projection lens assembly includes conduits (-) emanating from the connection region, and a conduit guiding body (-) for accommodating the conduits. The guiding body includes a first guiding portion () for guiding the conduits from the connection region, along the plane to a lateral region (B) beyond the lateral edge. The guiding body also includes a second guiding portion () for guiding the conduits from the lateral region (B) toward a tilted edge () of the conduit guiding body.

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The Hague, Netherlands

David Johannes Van Den Bergen