Varian Semiconductor Equipment Associates, Inc.

Other

Applied Materials, Inc.

David J Morrell

Peter Lawrence Kellerman

Frederick M Carlson

Nandish Desai

Dawei Sun

Ala Moradian

Brian H Mackintosh

Saeed Jazebi

George Emmanuel

Frank Sinclair

Paul J Murphy

Piotr R Lubicki

Brian Kernan

Charles L Stanley

Qin Chen

Semaan Y Fersan

Scott W Nickerson

William K Sands, Jr

Donald G DeVault

A system and method for reducing charge on a workpiece disposed on a platen is disclosed. The system includes an ionizer to generate ionized gas from the source of backside gas. The ionizer may be used to introduce ionized gas into the backside gas channels of the platen. A controller is used to selectively allow backside gas and/or ionized gas into the backside gas channels. In certain embodiments, the platen also includes an exhaust channel in communication with an exhaust valve to ensure that the pressure within the volume between the top surface of the platen and the workpiece is maintained in a desired range. In one embodiment, the system includes a valving system in communication with the source of backside gas and also in communication with the ionizer. In another embodiment, the amount of ionization performed by the ionizer is programmable.

System and method for dissipating workpiece charge build up

A solid state heater and methods of manufacturing the heater is disclosed. The heater comprises a unitary component that includes portions that are graphite and other portions that are silicon carbide. Current is conducted through the graphite portion of the unitary structure between two or more terminals. The silicon carbide does not conduct electricity, but is effective at conducting the heat throughout the unitary component. In certain embodiments, chemical vapor conversion (CVC) is used to create the solid state heater. If desired, a coating may be applied to the unitary component to protect it from a harsh environment.

Solid state heater and method of manufacture

An apparatus for controlling heat flow within a melt. The apparatus may include a crucible configured to contain the melt where the melt has an exposed surface. The apparatus may also include a heater disposed below a first side of the crucible and configured to supply heat through the melt to the exposed surface, and a heat diffusion barrier assembly comprising at least one heat diffusion barrier disposed within the crucible and defining an isolation region in the melt and an outer region in the melt.

Method for controlling heat flow within a silicon melt using a heat diffusion barrier assembly

Embodiments of the disclosure include a fault current limiter (FCL) providing symmetrical electrostatic shielding. In some embodiments, a FCL includes a superconductor maintained at a first voltage greater than zero voltage, and an enclosure containing the superconductor, the enclosure maintained at a second voltage greater than zero voltage, wherein the second voltage is different from the first voltage. The FCL may include an electrical connection directly coupling the superconductor and the enclosure, wherein the electrical connection enables each of a plurality of current limiting modules of the superconductor to receive, during a fault condition, an equal or unequal sub-portion of a total voltage drop.

Fault current limiter providing symmetrical electrostatic shielding

Apparatus for controlling heat flow within a silicon melt

Embodiments of the disclosure provide a current protection device for a fault current limiter, the current protection device including a detection circuit electrically coupled between a current transformer and a pneumatic timer, and an electrical vacuum interrupter (EVI) coupled to a pneumatic cylinder. In some embodiments, the EVI includes a set of breaker contacts, wherein the pneumatic timer is communicatively coupled with the pneumatic cylinder to actuate a moveable contact of the set of breaker contacts. In some embodiments, the detection circuit is configured to detect a current of the current transformer, and to provide a control signal to the pneumatic cylinder to open or close the set of breaker contacts based on the detected current.

Pneumatically operable current protection device for a fault current limiter

An apparatus for forming a crystalline sheet. The apparatus may include a crystallizer comprising a first gas channel and a second gas channel, wherein the first gas channel and second gas channel extend through the crystallizer to a lower surface of the crystallizer between an upstream edge and a downstream edge. The first gas channel may be disposed closer to the downstream edge than the second gas channel. A first gas source may be coupled to the first gas channel, where the first gas source comprises helium or hydrogen, and a second gas source may be coupled to the second gas channel, where the second gas source does not contain hydrogen or helium.

Apparatus and method for crystalline sheet growth

An apparatus may include a crucible configured to contain the melt, the melt having an exposed surface separated from a floor of the crucible by a first distance, a housing comprising a material that is non-contaminating to the melt, the housing comprising a plurality of sidewalls and a top that are configured to contact the melt, and a plurality of heating elements isolated from the melt and disposed along a transverse direction perpendicular to a pulling direction of the crystalline sheet, the plurality of heating elements being individually powered, wherein the plurality of heating elements are disposed at a second set of distances from the exposed surface of the melt that are less than the first distance, and wherein the plurality of heating elements are configured to vary a heat flux profile along the transverse direction when power is supplied individually to the plurality of heating elements.

Apparatus and method for controlling thickness of a crystalline sheet grown on a melt

A crystallizer for growing a crystalline sheet from a melt may include a cold block having a cold block surface that faces an exposed surface of the melt, the cold block configured to generate a cold block temperature at the cold block surface that is lower than a melt temperature of the melt at the exposed surface. The system may also include a nozzle disposed within the cold block and configured to deliver a gas jet to the exposed surface, wherein the gas jet and the cold block are interoperative to generate a process zone that removes heat from the exposed surface at a first heat removal rate that is greater than a second heat removal rate from the exposed surface in outer regions outside of the process zone.

System and method for crystalline sheet growth using a cold block and gas jet

An apparatus for processing a melt may include a crucible configured to contain the melt, where the melt has an exposed surface that is separated from a floor of the crucible by a first distance. The apparatus may further include a submerged heater comprising a heating element and a shell disposed between the heating element and the melt, wherein the heating element does not contact the melt. The heating element may be disposed at a second distance with respect to the exposed surface of the melt that is less than the first distance.

Apparatus for processing a melt

Method and apparatus for determining the length of a tubular member such as a pipe are disclosed. A burst of acoustical pulses are emitted from a sending unit and are received by a reference acoustical transducer and by a slave acoustic transducer. The slave transducer emits a return pulse which is used to compute the duration of the sound propagation interval between the ends of the pipe. A phase angle compensation factor is computed by measuring the phase shift of the signal received by the reference transducer with respect to the signal emitted by the master transducer.

Growing community of inventors

Odessa, TX, United States of America

David J Morrell