Chirp Microsystems Inc.

University of California

Invensense, Inc.

Hewlett-packard Development Company, L.P.

Analog Devices,inc.

Onix Microsystems, Inc.

Inertialwave

David Horsley

Richard J Przybyla

Stefon Shelton

Andre Guedes

Mitchell Herman Kline

Meng-Hsiung Kiang

Bernhard Boser

Storrs Townsend Hoen

Hao-Yen Tang

Yipeng Lu

Peter George Hartwell

Robert A Conant

Ofer Rozen

Jonah Alexander Harley

William Albert Clark

Benedict Costello

Fabian T Goericke

Sebastien Riccardi

James Alexander Gordon

Ryan Young

Carl Philip Taussig

Albert P Pisano

Behrang Behin

Michael J Daneman

Chung Ching Yang

Anthony Challoner

Paul P Merchant

Satinderpall S Pannu

Mo Li

David Lerner

Gerardo Jaramillo

Kansho Yamamoto

Richard J Przbyla

Parsa Taheri-Tehrani

A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form in a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.

Piezoelectric micromachined ultrasonic transducer with a patterned membrane structure

A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.

An ultrasonic transceiver system includes a transmitter block, a receiver block, a state machine, and a computing unit. The transmitter block contains circuitry configured to drive an ultrasound transducer. The receiver block contains circuitry configured to receive signals from the ultrasound transducer and convert the signals into digital data. The state machine is coupled to the transmitter and receiver blocks and contains circuitry configured to act as a controller for those blocks. The computing unit is coupled to the transmitter block, the receiver block, and the state machine and is configured to drive the transmitter block and process data received from the receiver block by executing instructions of a program. The program memory is coupled to the computing unit and is configured to store the program. The computing unit is configured to be reprogrammed with one or more additional programs stored in the program memory.

Programmable ultrasonic transceiver

A diaphragm for a piezoelectric micromachined ultrasonic transducer (PMUT) is presented having resonance frequency and bandwidth characteristics which are decoupled from one another into independent variables. Portions of at least the piezoelectric material layer and backside electrode layer are removed in a selected pattern to form structures, such as ribs, in the diaphragm which retains stiffness while reducing overall mass. The patterned structure can be formed by additive, or subtractive, fabrication processes.

Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (PMUT)

A robotic cleaning appliance includes a housing, surface treatment item, surface type detection sensor, and processor. The sensor emits sonic signals toward a surface being traversed and receives corresponding returned signals from the surface. The returned signals are used for surface type detection and include directly reflected primary returned signals and multi-path reflected secondary returned signals which return at a later time than the primary returned signals. The processor selects a window of time after transmission of a sonic signal such that the returned signals in the window comprise at least a portion of the secondary returned signals, wherein the window is related to round trip time-of-flight of the returned signals; processes the returned signals falling in the window to achieve a reflectivity metric; compares the reflectivity metric to a stored value; and based on the comparison, determines which surface type of a plurality of surface types has been detected.

Surface type detection

A transducer includes first and second piezoelectric layers made of corresponding different first and second piezoelectric materials and three or more electrodes, implemented in two or more conductive electrode layers. The first piezoelectric layer is sandwiched between a first pair of electrodes and the second piezoelectric layer is sandwiched between a second pair of electrodes. The first and second pairs of electrodes contain no more than one electrode that is common to both pairs.

Micromachined ultrasound transducer using multiple piezoelectric materials

Time of flight between two or more ultrasonic transceivers is measured using known delays. First and second transceivers are duty cycled, each having a respective receive period that is less than a measurement period during which the transceivers are configured to receive transmissions. An ultrasonic trigger pulse is transmitted by the first transceiver. The second transceiver, upon receiving the trigger pulse, transmits an ultrasonic response pulse after a first predefined delay time that is known to the first transceiver and greater than the receive period of the second transceiver. Subsequently, the first transceiver receives the ultrasonic response pulse and determines a receive time. The first transceiver determines the distance between the first transceiver and the second transceiver from a speed of sound, an elapsed time between the time of transmission of the trigger pulse and the receive time, and the first predetermine delay time.

Ultrasonic beacon tracking

A package design for a micromachined ultrasound transducer (MUT) utilizing curved geometry to control the presence and frequency of acoustic resonant modes is described. The approach consists of reducing in number and curving the reflecting surfaces present in the package cavity to adjust the acoustic resonant frequencies to locations outside the band of interest. The design includes a cavity characterized by a curved geometry and a MUT mounted to a side of a substrate facing the cavity with a sound emitting portion of the MUT facing an opening in the substrate. The substrate is disposed over an opening of the cavity with the substrate oriented such that the MUT located within the cavity.

Miniature ultrasonic transducer package

An ultrasonic transceiver system includes a transmitter block, a receiver block, a state machine, a computer unit. The transmitter block contains circuitry configured to drive an ultrasound transducer. The receiver block contains circuitry configured to receive signals from the ultrasound transducer and convert the signals into digital data. The state machine is coupled to the transmitter and receiver blocks and contains circuitry configured to act as a controller for those blocks. The computing unit is coupled to the transmitter block, the receiver block, and the state machine and is configured to drive the transmitter block and process data received from the receiver block by executing instructions of a program. The program memory is coupled to the computing unit and is configured to store the program. The computing unit is configured to be reprogrammed with one or more additional programs stored in the program memory.

A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The device consists of a flexible membrane that is connected to a rigid substrate via flexures. The flexures are defined by slots etched through the perimeter of the membrane. These features release the stress present on the structural layers of the membrane, making it less sensitive to residual stress. The flexures are designed to act as torsion springs so that the membrane's vibration mode shape is highly curved in the piezoelectric actuation area, thereby increasing the electromechanical coupling.

Piezoelectric micromachined ultrasonic transducers having stress relief features

MEMS ultrasound fingerprint ID systems are provided. Aspects of the systems include the capability of detecting both epidermis and dermis fingerprint patterns in three dimensions. Also provided are methods of making and using the systems, as well as devices that include the systems.

MUT fingerprint ID system

An ultrasonic transmitter system includes a digital controller, bandpass pulse-width modulator (BP-PWM) unit, a digital to analog converter (DAC), and an ultrasound transducer. The controller generates pulse width and phase reference signals. The BP-PWM configured receives these signals generates a pulse width modulation (PWM) output characterized by a pulse width and a phase based on the pulse width and phase reference signals. The DAC) receives the PWM output from the BP-PWM unit and generates an output characterized by the pulse width and phase. The ultrasonic transducer receives the output from the DAC and generates an output sound pressure in response to the output from the DAC. An amplitude of the RMS sound pressure depends on the pulse width of the output from the DAC.

Quadrature amplitude modulation circuitry for ultrasonic transducer

A tracking method includes displaying visual content on a screen of a head mounted display (HMD). One or more base stations may be stationary with respect to the screen while the visual content is being displayed. In contrast, one or more objects may move with respect to the screen while the visual content is being displayed. Time-difference-of-arrival (TDoA) and/or time-of-flight (ToF) may be measured for one or more ultrasonic pulses transmitted from the base station, one or more objects, or HMD. Position and orientation of the objects and HMD may be calculated based on the TDoA and ToF. Different frequencies of pulses may be used to locate the HMD and the objects. An electromagnetic synchronization signal from the HMD and/or base station may be used to measure TDoA. Position and orientation measurements may be fused with outputs from IMUS (inertial measurement units) to reduce jitter.

Three dimensional object-localization and tracking using ultrasonic pulses

Growing community of inventors

Berkeley, CA, United States of America

David Horsley