Average Co-Inventor Count = 4.00
ph-index = 5
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (9 from 3,783 patents)
9 patents:
1. 12183544 - Tuning voltage setpoint in a pulsed RF signal for a tunable edge sheath system
2. 10911081 - Systems and methods for reducing power reflected towards a higher frequency RF generator during a period of a lower RF generator and for using a relationship to reduce reflected power
3. 10853444 - Systems and methods for tuning an impedance matching network in a step-wise fashion
4. 10621265 - Systems and methods for tuning an impedance matching network in a step-wise fashion
5. 10469108 - Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator
6. 10403482 - Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator
7. 10296676 - Systems and methods for tuning an impedance matching network in a step-wise fashion
8. 10276350 - Systems and methods for using computer-generated models to reduce reflected power towards an RF generator during state transitions of the RF generator by controlling RF values of the RF generator
9. 9711332 - Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator