Xmems Labs, Inc.

David Hong

Chiung C Lo

Jemm Yue Liang

Wen-Chien Chen

Martin George Lim

Michael David Housholder

Chun-I Chang

Yuan-Shuang Liu

Hsien-Ken Liao

Lei Chen

JengYaw Jiang

Hai-Hung Wen

Ming-Che Chuang

Ping-Sheng Wang

Jengyaw Jiang

A manufacturing method for a device includes: providing a wafer including a first layer and a second layer; forming and patterning an actuating material formed on the wafer; patterning the first layer of the wafer to form a trench line; and removing a first part of the second layer. The first layer forms a film structure including a membrane. A slit is formed within and penetrates through the membrane because of the trench line. The film structure is actuated to form a vent temporarily because of the slit. An ear canal and an ambient of a wearable sound device are to be connected via the vent temporarily opened. The slit divides the membrane into a first membrane portion and a second membrane portion. A difference between the displacements of these two membrane portions is larger than a thickness of the membrane when the vent is formed.

Manufacturing method of device

A package structure includes a first substrate and a first device disposed on the first substrate. The first device includes at least one anchor structure, a film structure anchored by the anchor structure and an actuator configured to control the film structure to form a first vent temporarily. The film structure partitions a space into a first volume to be connected to an ear canal and a second volume connected to an ambient of a wearable sound device. The ear canal and the ambient are connected via the first vent when the first vent is opened. The first vent is opened by controlling a first membrane portion and a second membrane portion of the film structure, such that a difference between a first displacement of the first membrane portion and a second displacement of the second membrane portion is larger than a thickness of the film structure.

Device, package structure and manufacturing method of device

An acoustic transducer is configured to perform an acoustic transformation. The acoustic transducer is disposed within a wearable sound device or to be disposed within the wearable sound device. The acoustic transducer includes at least one anchor structure, a film structure and an actuator. The film structure is disposed within a first layer and anchored by the anchor structure disposed within a second layer. The actuator is disposed on the film structure, and the actuator is configured to actuate the film structure to form a vent temporarily. The film structure partitions a space into a first volume to be connected to an ear canal of a wearable sound device user and a second volume to be connected to an ambient of the wearable sound device. The ear canal and the ambient are to be connected via the vent temporarily opened when the film structure is actuated.

Acoustic transducer, wearable sound device and manufacturing method of acoustic transducer

An acoustic testing method includes providing an electrical signal to a wafer, receiving a sound wave generated by the acoustic transducer according to the electrical signal, and generating a sensing result for determining an acoustic functionality of the acoustic transducer. The wafer includes a plurality of acoustic transducers, and the electrical signal is provided to an acoustic transducer within the wafer.

Acoustic testing method and acoustic testing system thereof

A testing apparatus including a testing platform, a loading device, a testing-signal generating device, a sound sensing device, a control unit, and an unloading device is disclosed. The loading device is configured to load a plurality of under-test devices to the testing platform. The testing-signal generating device is configured to generate at least one testing signal. The plurality of under-test devices receives the at least one testing signal and produces at least one testing sound-according to the at least one testing signal. The sound sensing device is configured to receive the at least one testing sound. The control unit controls the unloading device to unload the plurality of under-test devices from the testing platform and controls the unloading device to categorize the plurality of under-test devices into a plurality of groups according to the at least one testing sound received by the sound sensing device.

Testing apparatus and testing method thereof

An acoustic transducer is disposed within a wearable sound device or to be disposed within the wearable sound device. The acoustic transducer includes a first anchor structure and a first flap. The first flap includes a first end and a second end. The first end is anchored by the first anchor structure, and the second end is configured to perform a first up-and-down movement to form a vent temporarily. The first flap partitions a space into a first volume to be connected to an ear canal and a second volume to be connected to an ambient of the wearable sound device. The ear canal and the ambient are connected via the vent temporarily opened.

A package structure includes a housing and a sound producing chip. The sound producing chip is disposed within the housing. The sound producing chip includes a membrane and an actuator. The membrane includes a coupling plate and a spring structure connected to the coupling plate. The actuator is configured to receive a driving signal to actuate the membrane. The spring structure is situated between the coupling plate and the actuator. The coupling plate is actuated to move by the actuator via the spring structure.

Package structure and methods of manufacturing sound producing chip, forming package structure and forming sound producing apparatus

A method for manufacturing an air pulse generating element is provided. First, a thin film layer including a membrane is provided, and then, a plurality of actuators are formed on the thin film layer. After that, a first chamber is formed between the thin film layer and a first plate and followed by patterning the thin film layer to form a plurality of valves, in which the membrane and the valves are formed of the thin film layer. Subsequently, a second chamber is formed between the thin film layer and a second plate, and a plurality of channels are formed in the first plate and the second plate.

Method for manufacturing air pulse generating element

A sound producing device includes an air pulse generating element and a control unit. The air pulse generating element includes an air chamber, a membrane, a first air entrance and a first valve. The membrane is disposed in the air chamber. The first air entrance is disposed at a side of the membrane in a first direction. The first valve is disposed between the first air entrance and the membrane. The control unit generates a driving signal to control a movement of the membrane, such that the air pulse generating element generates an air pulse in response to the driving signal. During an operation, an first airflow corresponding to the air pulse flows into or flows out of the air chamber through the first air entrance, and passes through the first air entrance substantially along a direction parallel to the first direction perpendicular to the moving direction of the membrane.

Sound producing device and valve

An air pulse generating element, disposed in a sound producing device, includes a membrane, disposed within a chamber; and a plurality of valves, disposed by the membrane within the chamber, configured to seal a plurality of openings of the chamber in response to a plurality of valve control signals; wherein the membrane and the plurality of valves are all fabricated at a first layer.

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Los Altos, CA, United States of America

David Hong