Leybold Inficon, Inc.

David H Holkeboer

Louis C Frees

Robert E Ellefson

A method for linearizing the sensitivity of a quadrupole mass spectrometric system to allow the sensor to more accurately report partial pressures of a gas in high pressure areas in which the reported data is effected by a number of loss mechanisms. According to the invention, correction factors can be applied empirically or software in a quadrupole mass analyzer system can be equipped with correcting software to expand the useful range of the mass spectrometer.

Method for linearization of ion currents in a quadrupole mass analyzer

A method for manufacturing a miniature quadrupole from a single blank includes fastening four lengthwise insulating strips into parallel slots formed in the blank. A lengthwise axial hole is cut through the blank for the guide wire used in the EDM process. The blank is machined lengthwise into four electrodes using the EDM process so that the electrodes are spaced apart in a widthwise direction and each electrode is connected to an adjacent electrode by one of the insulating strips. During the cutting, the electrodes are held in place by the insulating strips.

Method of manufacturing a miniature quadrupole using electrode-discharge

A miniaturized ion source for a mass spectrometer includes a anode and a focus plate whose interior surfaces form an ionization volume for a retained gas sample. Molecules of the gas sample are ionized by electrons, and the resulting ions are concentrated and converged through an exit aperture in the focus plate to the entrance of an ion analyzer, such as a quadrupole mass filter. Preferably, at least one of the anode and the focus plate includes a curved interior surface which converges the formed ions into a focused beam for directing into the ion analyzer. In addition, the thickness of the exit aperture of the focus plate and or the setback of the focus plate relative to the anode ensures that no line of sight exists between the interior surface of the anode from which ion-forming electrons can scatter into the adjacent ion analyzer.

Ion lens assembly for gas analysis system

A mass spectrometer gas analyzer includes an ion source for producing ions of a sample gas in a defined ion volume. An ion analyzer collects and analyzes a first portion of the produced ions to determine a partial pressure for a selected gas species within the sample gas. An oppositely disposed ion collector collects a second portion of the ions to determine a total pressure of the contained gas sample. A collecting surface of the ion collector is positioned relative to the incoming ion beam to allow collection of ion current but the surface is configured such that a substantial portion of a plurality of secondary electrons produced by ion bombardment with the ion collector are deflected away from the ionization volume. The partial pressure is thus determined by the ion analyzer without secondary electrons entering the ion analyzer.

Ion collecting electrode for total pressure collector

A dual beam ion source comprises an ion volume in an ion chamber, an ion collector, and two identical ion accelerators. One ion accelerator accelerates a first, 'test' ion stream from the ion volume in a first direction and directs it to the ion collector where it can be directly measured. The second ion accelerator accelerates a second, 'utilizable' ion stream from the ion volume in a second direction. By directly measuring the ion current (caused by the first, 'test' ion stream) at the ion collector, either or both the total ion pressure of the gas within the ion volume, and the magnitude of the second, 'utilizable' ion stream, can be calculated.

Growing community of inventors

Byron Center, MI, United States of America

David H Holkeboer