Cymatics Laboratories Corp.

Resonance Semiconductor Corporation

David Francois Guillou

Rajarishi Sinha

Anthony Tsangaropoulos

A resonator device comprising a piezoelectric material and at least one electrode, the device also provided with a material with a positive coefficient of stiffness, wherein the material is disposed in the device as an electrode or as a separate layer adjacent the piezoelectric material formed as one or more layers in the device. The material that performs the temperature compensating function is selected from the group consisting of ferromagnetic metal alloys, shape-memory metal alloys, and polymers, wherein the selected material has a temperature coefficient that varies with the relative amounts of the individual constituents of the compositions and wherein the composition is selected to provide the material with the positive coefficient of stiffness.

Temperature drift compensation of MEMS resonators

A bulk acoustic wave resonator structure that isolates the core resonator from both environmental effects and aging effects. The structure has a piezoelectric layer at least partially disposed between two electrodes. The structure is protected against contamination, package leaks, and changes to the piezoelectric material due to external effects while still providing inertial resistance. The structure has one or more protective elements that limit aging effects to at or below a specified threshold. The resonator behavior is stabilized across the entire bandwidth of the resonance, not just at the series resonance. Examples of protective elements include a collar of material around the core resonator so that perimeter and edge-related environmental and aging phenomena are kept away from the core resonator, a Bragg reflector formed above or below the piezoelectric layer and a cap formed over the piezoelectric layer. The resonator structure is suspended in a cavity in a cap structure.

Protected resonator

A MEMS or NEMS device with at least one component made of a non-naturally occurring isotope material. The refined isotopic material provides advantages to device operation such as reduced mechanical loss, increased breakdown voltage, improved tunability and other advantages.

MEMS devices made with isotopic materials

A direct digital frequency synthesizer having a multi-modulus divider, a numerically controlled oscillator and a programmable delay generator. The multi-modulus divider receives an input clock having an input pulse frequency fand outputs some integer fraction of those pulses at an instantaneous frequency fthat is some integer fraction (1/P) of the input frequency. The multi-modulus divider selects between at least two ratios of P (1/P or 1/P+1) in response to a signal from the numerically controlled oscillator. The numerically controlled oscillator receives an accumulator increment (i.e., the number of divided pulse edges) required before an overflow occurs that causes the multi-modulus divider to change divider ratios in response to an overflow. The numerically controlled oscillator also outputs both the overflow signal and a delay signal to the delay generator. The delay signal contains phase-dithering noise that is induced by input from a pseudo-random noise generator.

Growing community of inventors

Pittsburgh, PA, United States of America

David Francois Guillou