Orbotech Limited

David Fisch

Yigal Katzir

Ofer Saphier

Doron Malka

Amir Noy

Ilia Lutsker

Avraham Adler

Raanan Adin

Yariv Dror Mizrahi

Doron Eidelman

Avi Gross

Avinoam Rosenberg

Tali Hurvitz

Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.

Multi-modal wide-angle illumination employing a compound beam combiner

A distance measuring system is provided for auto focusing a camera of an inspection system for inspecting a planar surface that is patterned. The system includes a pattern generator, an image sensor, an optical element(s) and a processor. The pattern generator projects a spatially random pattern toward the planar surface at an oblique angle. The optical element(s) forms the image of the reflected pattern on the image sensor and the image sensor captures an image of the spatially random pattern reflected off the planar surface. The processor processes the image of the spatially random pattern and provides auto-focus information.

Auto-focus system

A new architecture for machine vision system that uses area sensor (or line sensor), with telecentric imaging optics compound with telecentric illumination module is described. The illumination module may include a bright field illumination source and/or a dark field illumination source. The telecentric imaging optics includes an upper imaging module having an aperture stop and a lower imaging module positioned between the upper imaging module and object, such that the light source and the aperture stop are located in the back focal plane of the lower imaging module. The lower imaging module images the illumination source into a plane of an aperture stop of the upper imaging module. The optical axis of the upper imaging module is offset with respect to the lower imaging module. The optical axis of the telecentric illumination module is offset with respect to the axis of the lower imaging module in the opposite direction.

Efficient telecentric optical system (ETOS)

An illumination device and method for inspecting objects having microscopic features is provided. The device includes an illuminator which provides a solid angle of angularly specific illumination defining an illumination angle, selected by a user from among a continuous range of possible illumination angles. The device further includes an object inspector which inspects the object illuminated by the illuminator. The illuminator may include an illumination source, a light concentrator, an illumination angle selector, disposed along a light path between the illumination source and the object inspector. The illumination angle selector may have a first position in which directly-reflected light propagates toward the object plane and a second position in which no light both selected by the illumination angle selector and directly reflected from the object plane enters the collecting lens. Rather, in the second position, only scattered light from the object plane enters the collecting lens.

Inspection system employing illumination that is selectable over a continuous range angles

Apparatus for high resolution processing of a generally planar workpiece having microscopic features to be imaged, comprising a video camera acquiring at least two candidate images of a microscopic portion on generally planar workpiece; a motion controller operative to effect motion, relative to the workpiece, of at least an optical element of the video camera along an optical axis extending generally normally to a location on a surface of the workpiece, the video camera acquiring the at least two candidate images at selected time intervals, each of the at least two candidate images differing by at least one image parameter; an image selector operative to select an individual image from among the at least two candidate images according to predefined criteria of image quality; and a selected image analyzer operative to analyze at least a portion of the individual image selected by the image selector.

System and method for inspecting workpieces having microscopic features

Method and apparatus for manufacture and inspection of flat articles, such as flat planel display substrates, that are manufactured in a contamination-sensitive environment. In particular, a manufacturing step such as applying coatings to the article is performed in a self-contained micro-environment, typically characterized by an airborn particulate concentration which is substantially lower than its surroundings. Automated inspection apparatus is provided inside the self-contained micro-environment of the fabrication equipment to inspect the article after completion of the fabrication step and before transfer of the article to other fabrication equipment. The inspection apparatus includes an illumination subsystem illuminating the article with various configurations of dark field and bright field illumination, a staring array sensor capturing images of the article under various illumination configurations and a computer that analyzes the images to automatically detect defects.

Apparatus and method for fabricating flat workpieces

An inspection illuminates a generally specular surface of an electrical circuit with flashes of light. The flashed light comes form at least two spectrally different sources, and is temporally spaced. A camera forms an optical image of the circuit for each flash of light. Optical images are combined to provide a combined image. An analysis of the combined image can detect defects, and production related decisions may be based on this analysis.

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Paduelle, Israel

David Fisch