Gtat Corporation

Mks Instruments, Inc.

David F Broyer

Gordon Hill

Ning Duanmu

David C Neumeister

Hui Zhang

Bradly Raymond Lefevre

Ian T Witting

A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.

Actively cooled vacuum isolation valve

According to the disclosed embodiments, an advanced crucible support system is described that allows for greater heat flow to and from the bottom of a crucible, preferably while also preventing excessive heat from reaching a heat exchanger. In particular, a support base is described that includes one or more vents enabling improved heat flow throughout the system. Also, according to one or more additional embodiments, the functionality of the crucible support is adapted to be leveraged by a crucible manipulating device. For example, the support plate may have a plurality of slots for insertion of a 'lifting arm', such that the entire support plate assembly, as well as the crucible itself while on the support assembly, may be lifted and transported as a single unit.

Advanced crucible support and thermal distribution management

According to the disclosed embodiments, an illustrative apparatus that is configured to attach to a viewport of a container comprises a first plate having a first aperture and an attached second plate having a second aperture substantially aligned to the first aperture. The first and second plates, when attached, define a cavity from an outer edge of the first and second plates to the substantially aligned apertures. A window containment arm is pivotally affixed to at least the first plate and configured to substantially fit and pivot into and out of the cavity, and a window contained within the window containment arm is positioned such that the window substantially aligns with the first and second apertures when the window containment arm is fully pivoted into the cavity, and such that the window is accessibly located outside of the cavity when the window containment arm is pivoted out of the cavity.

Adjustable pyrometer mount with removable viewport mechanism

Growing community of inventors

Kingston, NH, United States of America

David F Broyer