International Business Machines Corporation

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David Earle Seeger

Marie Angelopoulos

Ari Aviram

Jeffrey Donald Gelorme

Niranjan Mohanlal Patel

Thomas Harold Newman

Edward D Babich

William R Brunsvold

Andrew T Pomerene

Karen Elizabeth Petrillo

Evan G Colgan

Hariklia Deligianni

Christopher Vincent Jahnes

Paul Stephen Andry

Lawrence Shungwei Mok

Robert Allen Groves

Panayotis Constantinou Andricacos

John Patrick Simons

Chirag Suryakant Patel

Willard E Conley

Jennifer L Lund

L Paivikki Buchwalter

Daniel Bucca

Sampath Purushothaman

Ping-Chuan Wang

Timothy Dooling Sullivan

Qinghuang Lin

Wayne Martin Moreau

Fuad Elias Doany

Jane M Shaw

Naftali Eliahu Lustig

Harold John Hovel

Alessandro Cesare Callegari

Kuang-Jung Chen

Ahmad D Katnani

Douglas Andrew Buchanan

Michael Meixner

Inna V Babich

Donis G Flagello

Douglas Charles LaTulipe

Douglas C Latulipe, Jr

Howard M Clearfield

Fredric D Bailey

Christopher M Scherpereel

Ali Afzali-Ardakani

John Michael Cotte

Ali Afzali-ardakani

Raul E Acosta

Ronald Anthony DellaGuardia

John L Mauer, Iv

Michael G Rosenfield

Andrew T S Pomerene

Kaolin Ng Chiong

Apparatus and methods are provided for integrating microchannel cooling modules within high-density electronic modules (e.g., chip packages, system-on-a-package modules, etc.,) comprising multiple high-performance IC chips. Electronic modules are designed such that high-performance (high power) IC chips are disposed in close proximity to the integrated cooling module (or cooling plate) for effective heat extraction. Moreover, electronic modules which comprise large surface area silicon carriers with multiple chips face mounted thereon are designed such that integrated silicon cooling modules are rigidly bonded to the back surfaces of such chips to increase the structural integrity of the silicon carriers.

Integrated circuit chip module with microchannel cooling device having specific fluid channel arrangement

Electronic module comprising memory and integrated circuit processor chips formed on a microchannel cooling device

Semiconductor integrated circuit chip packages having integrated microchannel cooling modules

A microelectromechanical switch including: at least one pair of actuator electrodes; at least one input electrode and at least one output electrode for input and output, respectively, of a radio frequency signal; and a beam movable by an attraction between the at least one pair of actuator electrodes, the movable beam having at least a portion electrically connected to the at least one input electrode and to the at least one output electrode when moved by the attraction between the at least one pair of actuator electrodes to make an electrical connection between the at least one input and output electrodes; wherein the at least one pair of actuator electrodes are electrically isolated from each of the at least one input and output electrodes. The microelectromechanical switch can be configured in single or multiple-poles and/or single or multiple throws.

Micro-electro-mechanical RF switch

Disclosed is a novel composition of matter comprising a polyacid and a polymer containing repeating units which contain one or more basic atoms. The complex is water-soluble and electrically conductive. The complex is useful in providing organic discharge layers for use in electronic applications and fabrications.

Water-soluble electrically conducting polymers, their synthesis and use

The present invention is an admixture of an electrically conductive material and an energy sensitive material resulting in a conductive energy sensitive composition. The structures are useful for lithography in microelectronic fabrication to avoid the effects of charging on resists from electron beams. The compositions are also useful in applications of scanning electron metrology and static dissipation.

Energy sensitive electrically conductive admixtures, uses thereof, methods of fabrication and structures fabricated therewith

Disclosed is a capacitive electrostatic MEMS RF switch comprised of a lower electrode that acts as both a transmission line and as an actuation electrode. Also, there is an array of one or more fixed beams above the lower electrode that is connected to ground. The lower electrode transmits the RF signal when the top beam or beams are up and when the upper beams are actuated and bent down, the transmission line is shunted to ground ending the RF transmission. A high dielectric constant material is used in the capacitive portion of the switch to achieve a high capacitance per unit area thus reducing the required chip area and enhancing the insertion loss characteristics in the non-actuated state. A gap between beam and lower electrode of less than 1 &mgr;m is incorporated in order to minimize the electrostatic potential (pull-in voltage) required to actuate the switch.

MEMS RF switch with low actuation voltage

A high-performance radiation sensitive silicon-containing negative-tone resist is provided along with a method of using the silicon-containing resist in multilayer, including bilayer, imaging for manufacturing semiconductor devices. The negative-tone silicon-containing resist is based on an acid catalyzed high-contrast crosslinking of aqueous base soluble silicon-containing phenolic polymers through reaction of a carbocation of the crosslinking agent with the hydroxyl site of the phenolic group in the silicon-containing polymers. A chemically amplified silicon-containing negative-tone resist composition comprising said silicon-containing polymer resin; at least one crosslinking agent; one acid generator; and a solvent is provided. The silicon-containing resist composition has high silicon content and provide excellent resolution and a means of patterning high aspect ratio resist patterns. The resist compositions can be used as the top imaging layer in a multilayer, including bilayer, scheme to fabricate semiconductor devices using various irradiation sources, such as mid-ultraviolet (UV), deep-UV, extreme UV, X-ray, e-beam and ion-beam irradiation.

Radiation sensitive silicon-containing resists

High sensitivity, photo-active polymer and developers for high resolution resist applications

Energy sensitive electrically conductive admixtures

Crosslinked water-soluble electrically conducting polymers

Positive lithographic patterns are produced by imagewise exposing to actinic light, x-ray or e-beam a polymer having pendant recurring groups selected from the group consisting of

High sensitivity, photo-active polymer and developers for high

Growing community of inventors

Congers, NY, United States of America

David Earle Seeger