Photran Corporation

Viratec Thin Films, Inc.

David E Stevenson

Geoffrey H Humberstone

Erik J Bjornard

Samuel F Pellicori

An anti-reflection coating includes a first layer of a transparent material having a low refractive index a second layer of an absorbing metal, a third layer of a material which may have a high or a low refractive index and a fourth layer of titanium nitride.

Light attenuating anti-reflection coating including electrically

Vacuum coating apparatus (30) includes a coating chamber (32), and a load-lock chamber (34) connected to the coating chamber via a high vacuum valve (44). The coating chamber includes deposition-devices (123) and a cylindrical or drum shaped substrate-transporter (100) for transporting substrates (64) past the deposition-devices. Substrates are carried on substrate-carriers (66) which are configured to fit into transport-stations (102) around the periphery of the substrate-transporter. A magazine (61) holding a plurality of substrate-carriers is located in the load-lock chamber. An injector arrangement (120) is provided for ejecting a substrate-carrier from the magazine, transporting the substrate-carrier through the high vacuum valve, and inserting the substrate-carrier into a transport-station of the substrate-carrier.

Load-lock drum-type coating apparatus

A linear planar-magnetron sputtering cathode comprises a cathode body (22) including two side-walls (104) two end-walls (106) and a target-supporting member (102) attached to the walls. The cathode body encloses a magnet array (40) which may be moved reciprocally in at least one direction relative to the cathode body. A cooling fluid may be flowed through the target supporting member for cooling the target. A cooling fluid may also be flowed through the side-walls and the end-walls for cooling the end walls. A cooled enclosure is thus be provided for the magnet-array.

Linear planar-magnetron sputtering apparatus with reciprocating

An apparatus for rotatably mounting a cylindrical magnetron in a vacuum chamber. The apparatus includes a bearing housing having one end extending into the vacuum chamber with the other end located outside the chamber. A drive shaft is rotatably mounted in the bearing housing. Each end of the drive shaft extends beyond the housing. The cylindrical magnetron is attached to the end of the drive shaft inside the chamber. A vacuum seal is located in the bearing housing for sealing the drive shaft to the housing. The drive shaft is mounted in the housing such that the load of the magnetron is not transferred to the vacuum seal.

Cantilever mount for rotating cylindrical magnetrons

A rotatable magnetron having a cathode and a bearing assembly wherein the cathode may be removed from a coating chamber while the bearing assembly remains in place.

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Northfield, MN, United States of America

David E Stevenson