Praxair S.t. Technology, Inc.

David E Dombrowski

Thomas J Hunt

Holger J Koenigsmann

Andrew C Perry

The method manufactures high-purity ferromagnetic sputter targets by cryogenic working the sputter target blank at a temperature below at least &#x2212;50&#xb0; C. to impart at least about 5 percent strain into the sputter target blank to increase PTF uniformity of the target blank. The sputter target blank is a nonferrous metal selected from the group consisting of cobalt and nickel; and the nonferrous metal has a purity of at least about 99.99 weight percent. Finally, fabricating the sputter target blank forms a sputter target having an improved PTF uniformity arising from the cryogenic working.

High-purity ferromagnetic sputter targets and method of manufacture

The method manufactures high-purity ferromagnetic sputter targets by cryogenic working the sputter target blank at a temperature below at least &minus;50&deg; C. to impart at least about 5 percent strain into the sputter target blank to increase PTF uniformity of the target blank. The sputter target blank is a nonferrous metal selected from the group consisting of cobalt and nickel; and the nonferrous metal has a purity of at least about 99.99 weight percent. Finally, fabricating the sputter target blank forms a sputter target having an improved PTF uniformity arising from the cryogenic working.

Growing community of inventors

Tuxedo Park, NY, United States of America

David E Dombrowski