Kla Corporation

David Dowling

Bjorn Brauer

Hucheng Lee

Sangbong Park

Santosh Bhattacharyya

Xiaochun Li

Bryant Mantiply

Tarunark Singh

A method of semiconductor-wafer image alignment is performed at a semiconductor-wafer defect-inspection system. In the method, a semiconductor wafer is loaded into the semiconductor-wafer defect-inspection system. Pre-inspection alignment is performed for the semiconductor wafer. After performing the pre-inspection alignment, a first swath is executed to generate a first image of a first region on the semiconductor wafer. An offset of a target structure in the first image with respect to a known point is determined. Defect identification is performed for the first image, using the offset. After executing the first swath and determining the offset, a second swath is executed to generate a second image of a second region on the semiconductor wafer. While executing the second swath, run-time alignment of the semiconductor wafer is performed using the offset.

Defect-location determination using correction loop for pixel alignment

Growing community of inventors

Chalfont St. Peter, United Kingdom

David Dowling