Corning Incorporated

David Charles Sauer

Paul John Shustack

Robert Sabia

Paul Gerard Dewa

Kamal Kishore Soni

Kelsee L Coykendall

John Stephen Peanasky

Andrei Gennadyevich Fadeev

Mahendra Kumar Misra

Raymond E Lindner

Robert Scott Burkhalter

A method for measuring volatile organic compounds includes loading glass containers into an oven, heating the oven, purging the oven with dry clean air, collecting a volumetric portion of an oven exhaust, trapping volatile organic compounds from the volumetric portion, and measuring the volatile organic compounds trapped in the trap. The one or more glass containers are in-tact while measuring the VOCs of the coated glass container. An apparatus includes an oven having an interior volume that is capable of holding one or more in-tact glass containers, a flow meter fluidly connected to the first trap, and a pump fluidly connected to the flow meter. The first trap collects volatile organic compounds from a volumetric portion of the oven exhaust gas. The pump controls a flow rate of the volumetric portion of the oven exhaust gas across the first trap.

Methods and apparatuses for detecting volatile organic compounds in glass packaging processes

Disclosed are photo or electron beam polymerizable compositions, and preparation thereof and devices containing them. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 157 nm lithographic tools.

Low outgassing photo or electron beam curable rubbery polymer material, preparation thereof and device comprising same

Disclosed are photo or electron beam curable polymerizable compositions, and preparation thereof and devices containing such cured material. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools and other optical devices involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 248 nm, 193 nm and 157 nm lithographic tools, as well as other optical devices involving using high fluence irradiation.

Device comprising low outgassing photo or electron beam cured rubbery polymer material

Methods for producing high purity fused silica (HPFS) glass having desired levels of dissolved hydrogen are provided. The methods involve measuring the level of hydrogen in the cavity of the furnace used to produce the glass and controlling the pressure within the furnace and/or gas flows to the furnace's burners so that the measured concentration has a desired value. In this way, the level of dissolved hydrogen in the glass can be controlled since, as shown in FIG. there is a direct correlation between the hydrogen concentration in the cavity atmosphere and level of dissolved hydrogen in the glass.

Methods for producing fused silica glass

Growing community of inventors

Horseheads, NY, United States of America

David Charles Sauer