Fsi International, Inc.

Tel Fsi, Inc.

Tfl Fsi, Inc.

David C Zimmerman

Robert E Larson

Edward Hanzlik

Gregory Paul Thomes

Todd K Maciej

Christina Ann Rathman

Sean D Simondet

Mark Goluch

Quirin W Matthys

An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.

Apparatus and method for scanning an object through a fluid stream

Apparatus and method for scanning an object through a fluid spray

The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.

Reduced footprint tool for automated processing of microelectronic substrates

Growing community of inventors

Prior Lake, MN, United States of America

David C Zimmerman