Globalfoundries Inc.

Other

David C Mosher

Edward Crandal Cooney, Iii

Felix Patrick Anderson

Michael S Dusablon

Paul Charles Jamison

Glen L Miles

Frank Grellner

Emmanuel Batt

Disclosed is a method of forming back end of the line (BEOL) metal levels with improved dielectric capping layer to metal wire adhesion. The method includes process step(s) designed to address dielectric capping layer to metal wire adhesion, when the metal wire(s) in a given metal level are relatively thick. These process step(s) can include, for example: (1) selective adjustment of the deposition tool used to deposit the dielectric capping layer onto metal wires based on the pattern density of the metal wires in order to ensure that those metal wires actually achieve a temperature between 360&#xb0; C.-400&#xb0; C.; and/or (2) deposition of a relatively thin dielectric layer on the dielectric capping layer prior to formation of the next metal level in order to reduce the tensile stress of the metal wire(s) below without causing delamination. Also disclosed is an IC chip formed using the above-described method.

Method for forming BEOL metal levels with multiple dielectric layers for improved dielectric to metal adhesion

Structure for BEOL metal levels with multiple dielectric layers for improved dielectric to metal adhesion

A method for adjusting an etch rate of a nitride layer, in accordance with the present invention includes, in a reaction chamber, providing a surface for depositing a nitride layer. The nitride layer is deposited on the surface by adjusting processing parameters to control an etch rate achievable for the nitride layer. The etch rate achievable results from the depositing step such that an ability to etch the nitride layer is determined by the adjustment of the process parameters. A refractive index measurement may be provided for monitoring the achievable etch rate for the nitride layer.

Modification of the wet characteristics of deposited layers and in-line control

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Colchester, VT, United States of America

David C Mosher