Lynred

Ulis

Scientifique (cnrs)

Universite Paris-saclay Centre National De La Recherche

Centre National De La Recherche Scientifique

Université Paris-saclay

Msg Lithoglas Gmbh

David Bunel

Simon Maus

Ulli Hansen

Jérôme Favier

Johan Moulin

Sylvain Lemettre

Alain Bosseboeuf

Jerome Favier

A hermetic housing is disclosed () for an optoelectronic component () or a MEMS device configured to form an enclosure () within which a low pressure or vacuum prevails. The hermetic housing includes: an optical window () transparent for at least one wavelength of interest (&#x3bb;); and a layer of a getter material () configured to capture gases present in said enclosure and deposited on the optical window opposite the enclosure. This layer of getter material has a thickness (e_t), greater than 60 nanometers, and a porosity (P) in the range from 10 to 70% to satisfy the following relation: (1&#x2212;P)*e_t&#x3c;&#x3bb;/2&#x3c0;k with &#x3bb; corresponding to the at least one wavelength of interest, and k corresponding to the extinction coefficient of the material of the layer of getter material for the at least one wavelength of interest of the optical window.

Hermetic housing comprising a getter, optoelectronic component or MEMS device incorporating such a hermetic housing and associated production method

A device having a microelectronic component housed in a hermetically sealed housing having a vacuum inner space, and including a getter that substantially traps only hydrogen, is inert to oxygen and/or to nitrogen, and is housed in said inner space. Each of the constituent parts of the device being likely to degas into the inner space is a mineral material.

Method for manufacturing a device comprising a hermetically sealed vacuum housing and getter

A method of manufacturing a device having a microelectronic component housed in a hermetically sealed vacuum housing, including forming a getter in said housing, pumping out and heating the device to degas elements housed in said housing, after said pumping, hermetically sealing the housing in fluxless fashion. Further, each material forming the device likely to degas into the inner space is a mineral material, the getter is capable of substantially trapping hydrogen only and is inert to oxygen and/or to nitrogen and the heating and the sealing are performed at a temperature lower than 300&#xb0; C.

Growing community of inventors

Moirans, France

David Bunel