Motorola Corporation

David B Rhine

Thomas J Smekal

Piotr Grodzinski

Vijay K Nair

Jenn-Hwa Huang

Kurt W Eisenbeiser

Xunhu Dai

Jeremy W Burdon

Benjamin W Gable

Sean Gallagher

Robert Marrero

Barbara Foley Barenburg

Yuk-Tong Chan

A fluidic pump ( ) comprises an electrolyte cavity ( ) and a pump outlet ( ) fluidically coupled to the electrolyte cavity that are within at least a portion of a fluid guiding structure ( ), two electrodes ( ) extending from the fluid guiding structure into the electrolyte cavity; and a vapor permeable membrane ( ) that prevents an electrolyte ( ) in the electrolyte cavity from passing through the pump outlet while allowing gas to flow through the pump outlet.

Fluidic pump

The present invention provides low cost microfluidic devices having embedded metal conductors. The devices of the invention comprise a electronic component comprising a substrate having a first surface, a layer of electrically-conductive material deposited on a portion of the first substrate surface, a first sublayer of electrically-insulating material deposited on the first substrate surface and on the layer of electrically-conductive material, a second sublayer of electrically-insulating material deposited on the first sublayer of insulating material, and a third sublayer of electrically-insulating material deposited on the layer of dielectric material, and a fluid-handling component having a contoured surface affixed to the electronic component. The devices of the invention are advantageously used for performing electric field lysis and the polymerase chain reaction. The invention further advantageously provides simple, low cost methods for fabricating such microfluidic devices.

Microfluidic devices having embedded metal conductors and methods of fabricating said devices

A microwave device has a monolithic microwave integrated circuit (MMIC) disposed therein for applying microwave radiation to a microfluidic structure, such as a chamber, defined in the device. The microwave radiation from the MMIC is useful for heating samples introduced into the microfluidic structure and for effecting lysis of cells in the samples. Microfabrication techniques allow the fabrication of MMICs that perform heating and cell lysing of samples having volumes in the microliter to picoliter range.

Microfluidic devices with monolithic microwave integrated circuits

A manufacturable GaAs VFET process includes providing a doped GaAs substrate with a lightly doped first epitaxial layer thereon and a heavily doped second epitaxial layer positioned on the first epitaxial layer. A temperature tolerant conductive layer is positioned on the second epitaxial layer and patterned to define a plurality of elongated, spaced apart source areas. Using the patterned conductive layer, a plurality of gate trenches are etched into the first epitaxial layer adjacent the source areas. The bottoms of the gate trenches are implanted and activated to form gate areas. A gate contact is deposited in communication with the implanted gate areas, a source contact is deposited in communication with the patterned conductive layer overlying the source areas, and a drain contact is deposited on the rear surface of the substrate.

Manufacturable GaAs VFET process

Growing community of inventors

Phoenix, AZ, United States of America

David B Rhine