Samsung Electronics Co., Ltd.

Intel Corporation

Leland Stanford Junior University

David Andrew Barclay Miller

Yoon-Dong Park

Jun-Fei Zheng

Young-gu Jin

In-sung Joe

Vijit Sabnis

Onur Fidaner

Hilmi Volkan Demir

Silicon photodetectors using near-infrared dipole antennas. The photodetectors include a silicon region formed on a semiconductor substrate, dipole antenna forming two arms that are spaced apart with the silicon region therebetween and inducing an electromagnetic wave signal of incident light, and electrodes disposed in a vertical direction of the dipole antenna and spaced apart with the silicon region therebetween, where a critical bias voltage is applied to the electrodes to induce an avalanche gain operation in the silicon region.

Near-infrared photodetectors, image sensors employing the same, and methods of manufacturing the same

Methods in accordance with the present invention provide a quasi-planarized surface between one or more semiconductor devices and at least a portion of surrounding passivation material, where the devices have different elevations above a substrate. A hard mask defines the planarized surface as the interface between the hard mask and both the passivation layer and the device, after a passivation layer etching process. The resulting planarized surface has a small to zero step height, is insensitive to passivation layer non-uniformity and etch non-uniformity, provides full passivation of the device side wall, provides protection for the device against etch-induced damage, and prevents the detrimental effects of passivation layer voids. The methods are applicable to semiconductor device fabrication for electronic and photonic/optoelectronic systems such as, but not limited to, cell phones, networking systems, high brightness (HB) LEDs, laser diodes (LDs), photodiodes, modulator diodes and multifunction solar cells.

Wafer-level quasi-planarization and passivation for multi-height structures

Growing community of inventors

Stanford, CA, United States of America

David Andrew Barclay Miller