Applied Materials, Inc.

David Alexander Sell

Samarth Bhargava

Kevin Messer

Ludovic Godet

Daihua Zhang

Xiaopei Deng

Zhengping Yao

Jingyi Yang

Yingdong Luo

Brian Alexander Cohen

Embodiments of the present disclosure generally relate to methods for forming a waveguide. Methods may include measuring a waveguide substrate, the waveguide having a substrate thickness distribution; and depositing an index-matched layer onto a surface of the waveguide, the index-matched layer having a first surface disposed on the waveguide substrate and a second surface opposing the first surface, wherein the index-matched layer is disposed only over a portion of the waveguide substrate, and a device slope of a second surface of the index-matched layer is substantially the same as the waveguide slope of the first surface of the waveguide.

Total or local thickness variation for optical devices

Gradient encapsulation of waveguide outcoupler gratings for control of diffraction efficiency and directionality includes a first grating formed over a substrate, the first grating having a plurality of first structures extending away from the substrate, the first grating corresponding to an outcoupler. The device includes a first encapsulant disposed in one or more gaps formed between adjacent first structures, where a fill ratio of the first encapsulant decreases along the first grating. Also described herein are methods for fabricating the device.

Gradient encapsulation of waveguide gratings

Embodiments of the present disclosure generally relate to augmented reality waveguide combiners. The waveguides includes a waveguide substrate, having a substrate refractive index (RI) n, a slab waveguide layer disposed over the waveguide substrate, the slab waveguide layer having a slab RI nand a slab depth d, the slab depth dfrom a lower surface to an upper surface of the slab waveguide layer, at least one grating defined by a plurality of grating structures, the grating structures are disposed in, on, or over the slab waveguide layer, and a superstrate between and over the grating structures, the superstrate having a superstrate RI nand an interface with the slab waveguide layer. The slab RI nis greater than the substrate RI nand the slab RI nis greater than the superstrate RI n.

Slab waveguide layer for enhanced near-eye-display surface relief grating lightguide

Embodiments of the present disclosure generally relate to methods of forming a substrate having a target thickness distribution at one or more eyepiece areas across a substrate. The substrate includes eyepiece areas corresponding to areas where optical device eyepieces are to be formed on the substrate. Each eyepiece area includes a target thickness distribution. A base substrate thickness distribution of a base substrate is measured such that a target thickness change can be determined. The methods described herein are utilized along with the target thickness change to form a substrate with the target thickness distribution.

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Santa Clara, CA, United States of America

David Alexander Sell