Brooks Automation Gmbh

Asyst Technologies, Inc.

David Adams

Anthony C Bonora

Richard Howard Gould

Michael D Brain

Laurence Dulmage

Eric Winger

Jed Keller

J B Price

Lawrence Wise

A modular cluster tool is disclosed. According to one embodiment, a system, comprises a wafer transfer station that includes a first vacuum chamber that stores a plurality of semiconductor wafers. The system also includes an equipment front end module interface, and two or more shuttle lock interfaces.

Linear wafer drive for handling wafers during semiconductor fabrication

An integrated intra-bay transfer, storage and delivery system is provided for moving an article between a conveyor and a station such as a work station. The system includes a transfer assembly which includes a lift mechanism and a displacement mechanism. The transfer assembly transfers the article between the conveyor system and a buffer or storage station for storage of the article. A delivery robot transfers the article between the buffer or storage station and a work station for delivery to the station. The robot includes a vertical movement mechanism and a horizontal movement mechanism. The robot also includes an arm that is adapted to grip the article, particularly an article of a standard configuration having a mushroom-shaped handle on top. The arm engages the handle and lifts the article or transport pod from the storage station to a load port of the work station. In one embodiment, the arm includes a C-shaped adaptation that passively engages the handle from a side thereof. In other embodiments, the arm includes an actuator coupled to an assembly that actively grips the handle from above. Advantages of the invention include the ability to safely move the transport pod from a elevated storage station to the lower placed storage stations or load ports of a work station.

Integrated intra-bay transfer, storage, and delivery system

Growing community of inventors

Belmont, CA, United States of America

David Adams