Ge Healthcare Bio-sciences Corp.

David A Stewart

Paul Carlyle Goodwin

Steven A Reese

William Michael Dougherty

Methods and apparatus are described for delivering index-matching immersion liquid in high numerical-aperture optical microscopy and lithography. An array of immersion liquid droplets is delivered to a specimen substrate or specimen substrate cover by an immersion liquid printing apparatus. An immersion liquid reservoir provides immersion liquid to the printer by a precision pump. The printer delivers immersion liquid to the substrate or substrate cover in arrays of immersion liquid droplets of defined volumes and array patterns. The volumes and patterns of array droplets delivered to the substrate or substrate cover are optimized to maintain adequate immersion liquid between the substrate or substrate cover and an immersion objective while avoiding the formation of air bubbles in the immersion liquid and the accumulation of excess volumes of immersion liquid.

Dispersing immersion liquid for high resolution imaging and lithography

The subject matter of the present disclosure generally relates to objective lens changers for optical instruments. In one embodiment, an objective lens changer includes an objective lens carrier moveably attached to a changer frame by a mechanical link arrangement. The objective lens carrier includes two or more objective lens positions. The mechanical link arrangement includes a first link section to provide translation of the objective lens carrier between the objective lens positions and a second link section arranged to control an alignment of the objective lens position with respect to the optical axis of the optical instrument.

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Kirkland, WA, United States of America

David A Stewart