Northern Telecom Limited

David A Spear

George H Thompson

Piers James Dawe

A technique for achieving a substantially planar structure incorporating embedded vapor phase epitaxial growth involves the use of a window-frame shaped mask 40 of epitaxial growth resistant material to define a well in which embedded growth is to occur, and subsequently to ease mask registration problems in the location of a mask 60 employed while selectively removing unwanted material epitaxially grown on regions surrounding the well. Complementary format structures may also be formed in which epitaxial growth is provided up the sides of a mesa to substantially the same height as material grown on top of the mesa itself.

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Essex, United Kingdom

David A Spear