Avogy, Inc.

Nexgen Power Systems, Inc.

Agilent Technologies, Inc.

Dave P Bour

Isik C Kizilyalli

Thomas R Prunty

Hui Nie

Andrew Paul Edwards

Gangfeng Ye

Linda T Romano

Ozgur Aktas

Quentin Diduck

Nicolas J Moll

Hans G Rohdin

Sung Soo Yi

A method of fabricating an electronic device includes providing a III-V substrate having a hexagonal crystal structure and a normal to a growth surface characterized by a misorientation from the &#x3c;0001&#x3e; direction of between 0.15&#xb0; and 0.65&#xb0;. The method also includes growing a first III-V epitaxial layer coupled to the III-V substrate and growing a second III-V epitaxial layer coupled to the first III-V epitaxial layer. The method further includes forming a first contact in electrical contact with the III-V substrate and forming a second contact in electrical contact with the second III-V epitaxial layer.

High power gallium nitride electronics using miscut substrates

A method for fabricating a merged p-i-n Schottky (MPS) diode in gallium nitride (GaN) based materials includes providing an n-type GaN-based substrate having a first surface and a second surface. The method also includes forming an n-type GaN-based epitaxial layer coupled to the first surface of the n-type GaN-based substrate, and forming a p-type GaN-based epitaxial layer coupled to the n-type GaN-based epitaxial layer. The method further includes removing portions of the p-type GaN-based epitaxial layer to form a plurality of dopant sources, and regrowing a GaN-based epitaxial layer including n-type material in regions overlying portions of the n-type GaN-based epitaxial layer, and p-type material in regions overlying the plurality of dopant sources. The method also includes forming a first metallic structure electrically coupled to the regrown GaN-based epitaxial layer.

Method of fabricating a merged P-N junction and schottky diode with regrown gallium nitride layer

A vertical III-nitride field effect transistor includes a drain comprising a first III-nitride material, a drain contact electrically coupled to the drain, and a drift region comprising a second III-nitride material coupled to the drain and disposed adjacent to the drain along a vertical direction. The field effect transistor also includes a channel region comprising a third III-nitride material coupled to the drift region, a gate region at least partially surrounding the channel region, and a gate contact electrically coupled to the gate region. The field effect transistor further includes a source coupled to the channel region. The source includes a GaN-layer coupled to an InGaN layer. The channel region is disposed between the drain and the source along the vertical direction such that current flow during operation of the vertical III-nitride field effect transistor is along the vertical direction.

InGaN ohmic source contacts for vertical power devices

A gallium nitride (GaN)-based junction field-effect transistor (JFET) can include a GaN drain region having a top surface extending in a lateral dimension, a source region, and a GaN channel region of a first conductivity type coupled between the source region and the GaN drain region and operable to conduct electrical current between the source region and the GaN drain region. The JFET can also include a blocking layer disposed between the source region and the GaN drain region such that the GaN channel region is operable to conduct the electrical current substantially along the lateral dimension in a laterally-conductive region of the GaN channel region, and a GaN gate region of a second conductivity type coupled to the GaN channel region such that the laterally-conductive region of the GaN channel region is disposed between at least a portion of the blocking layer and the GaN gate region.

Lateral GaN JFET with vertical drift region

Ingan ohmic source contacts for vertical power devices

An embodiment of a semiconductor device includes a III-nitride base structure of a first conductivity type, and a III-nitride emitter structure of a second conductivity type having a first surface and a second surface. The second surface is substantially opposite the first surface. The first surface of the III-nitride emitter structure is coupled to a surface of the III-nitride base structure. The semiconductor also includes a first dielectric layer coupled to the second surface of the III-nitride emitter structure, and a spacer coupled to a sidewall of the III-nitride emitter structure and the surface of the III-nitride base structure. The semiconductor also includes a base contact structure with a III-nitride material coupled to the spacer, the surface of the III-nitride base structure, and the first dielectric layer, such that the first dielectric layer and the spacer are disposed between the base contact structure and the III-nitride emitter structure.

GaN vertical bipolar transistor

A heterojunction for a semiconductor device. The heterojunction has a first region formed from a first semiconductor material having a first conductivity type, a second region formed from a second semiconductor material having a second conductivity type, and an intermediate layer between the first region and the second region. The band line-up of the first region, the intermediate layer, and the second region has no bound states in its conduction band and no bound states in its valence band. The intermediate layer has a thickness small enough to allow electrons to tunnel from the first region to the second region with negligible attenuation. The semiconductor device may be a heterojunction bipolar transistor. The conduction band of the intermediate layer has a higher energy level than the conduction bands of the first and second regions.

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Cupertino, CA, United States of America

Dave P Bour