Axcelis Technologies, Inc.

Dave Broyer

Dale K Stone

Ashwin Madhukar Purohit

Steve Drummond

The present invention is directed to a system and a method for peeling a wafer off of an electrostatic clamp (ESC). The ESC removal system comprises a electrostatic clamp and a wafer electrically coupled and physically in contact with each other. A plurality of grippers or pins are arranged with respect to the wafer and the ESC to allow the wafer to be peeled off or removed section by section from the electrostatic clamp. The system and method allow the wafer to be removed with a much lower pull force than current systems and methods.

Growing community of inventors

Kingston, NH, United States of America

Dave Broyer