Watlow Electric Manufacturing Company

Other

Daryl G James

John Bergen

William Bohlinger

James P Hentges

Kurt W Peterson

Larry Walters

Stanton Hopkins-Breitlow

Jason Houzenga

Gil Ramos

Vladimir Draganov

Robert T Carlson

Derek G Montgomery

Robert L Kehr

Pablo Bandera

John Patrick Bergen

An assembly, for example an electrostatic chuck assembly, includes a first member, a second member disposed proximate the first member, a bond layer disposed between the first member and the second member, and at least one optical sensor disposed proximate the bond layer to detect a temperature of the bond layer in a field of view of the at least one optical sensor. The bond layer includes a phosphorescent material and provides a dual function of bonding the second member to the first member and emitting phosphorescent radiation towards the at least one optical sensor. In one form, the first member is an electrostatic chuck member and the second member is a heating plate. The assembly may further include a cooling plate and an additional bond layer disposed between the heating plate and the cooling plate.

Bonded assembly with integrated temperature sensing in bond layer

An assembly, for example an electrostatic chuck, is provided including a substrate, an electrostatic chuck, a heating plate, and a bond layer comprising a phosphorescent material. In one form, an optical sensor is disposed proximate the bond layer to detect a temperature of the bond layer in the field of view of the optical sensor. The phosphorescent material is illuminated and the subsequent decay is observed by the optical sensor. From this information, the temperature of the electrostatic chuck and substrate is determined and heating elements may be adjusted by a controller.

A process controller is provided and includes at least one optical sensor. The optical sensor includes an optical source is configured to emit an electronic signal toward an object. The process controller further includes a control unit in communication with the at least one optical sensor, wherein the control unit controls a controlled device based on the electronic signal received by the at least one optical sensor. In another form, the optical sensor further includes an optical detector configured to receive the return electronic signal reflected by the object. A system for process control in an elevated radio frequency (RF) environment is also provided and includes a process controller having at least one optical sensor and a control unit in communication with the optical sensor. The optical sensor is disposed within the elevated RF environment and includes an optical detector.

Process controller with an integrated optical detector

A compact telescope having a modified Gregorian design comprising three reflecting surfaces. The first reflecting surface is concave and is defined by an outer perimeter and an inner perimeter. The curvature of the first reflecting surface defines a focal plane of the first reflecting surface. The second reflecting surface is optically coupled to the first reflecting surface and is disposed between the first reflecting surface and the focal plane defined by the first reflecting surface. The third reflecting surface is concave and is disposed within the inner perimeter of the first reflecting surface. The curvature of the third reflecting surface is greater than the curvature of the first reflecting surface. The third reflecting surface is optically coupled to the first reflecting surface by the second reflecting surface. An aperture is disposed within the third reflecting surface. Thus light incident upon the first reflecting surface is directed through the aperture.

Compact telescope

Growing community of inventors

Coquitlam, Canada

Daryl G James