Advanced Energy Industries, Inc.

Daryl Frost

Hendrik Walde

Mike Armstrong

John Accardo

Doug Pelleymounter

Forrest Morgan

Frank Heine

Hendrik V Walde

Generators and methods for igniting a plasma in a plasma chamber are disclosed. The generator includes an ignition profile generator that includes a data interface configured to receive a specification for voltage as a function of time and an ignition data generator configured to create an ignition profile from the specification. The generator also includes an ignition profile datastore to store the ignition profile and a waveform generator configured to apply a waveform with the ignition profile to an output of the generator.

Programmable plasma ignition profiles

Generators and methods for igniting a plasma in a plasma chamber are disclosed. The generator includes an ignition profile generator that includes a data interface configured to receive a voltage value and a time value for each of N data points and an ignition data generator configured to create an ignition profile from the N data points. The generator also includes an ignition profile datastore to store the ignition profile and a waveform generator configured to apply a waveform with the ignition profile to an output of the generator.

Programmable ignition profiles for enhanced plasma ignition

This disclosure describes systems, methods, and apparatus for reducing current imbalances between phases in a multi-phase converter as well as reducing instances of particular phases switching twice within a single pulse-width modulated cycle, or other time period. Phases that have not switched for a longest period of time can be compared to see if swapping their firing patterns would reduce current imbalances, and if so, then those firing patterns can be swapped.

Phase current balancing for multiphase coupled inductor converter

Among many embodiments, a power conversion apparatus and a method for converting power are disclosed. The power conversion apparatus may include switching components configured to create an alternating current; a preemptive detector arranged and configured to provide, in advance of the alternating current reaching a zero-crossing, a control signal responsive to the alternating electrical current approaching the zero-crossing; and a controller configured, at least in part, to change a state of the switching components before the zero crossing, in response to the control signal.

Power converter with preemptive protection

Preemptive protection for a power convertor

One embodiment comprises a plasma processing system having a plasma chamber, a generator, a feedback component, and a controller. The feedback component is adapted to receive at least one first signal having a level dependent upon the power signal supplied from the generator to the chamber. A feedback output is adapted to emit a second signal to the controller, which is adapted to supply a third signal to the power generator. The third signal is configured to control the power generator to supply the power signal at a power level for a particular processing application. The power generator is further controlled by the controller to one of reduce and remove power from the plasma processing chamber and subsequently increase the voltage level until the power level reaches a threshold level. The power generator is further controlled to subsequently modulate the voltage until the voltage returns to a first voltage level.

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Windsor, CO, United States of America

Daryl Frost