Mykrolis Corporation

Brooks Instrument, LLC

Daryl Buchanan

Stuart A Tison

Faisal Tariq

Hai Mei

Shiyuan Cheng

Michael W Fortner

Dwight S Larson

Systems and methods for producing and delivering vapor are disclosed. A vaporizer tank containing a liquid may be heated such that liquid within the tank is heated and vapor generated. The flow of this vapor to a destination may then be regulated. Embodiments of the present invention may control the temperature of this liquid such that a saturated vapor condition is substantially maintained in the vaporizer tank. The vaporizer tank is coupled to a mass flow controller which regulates the delivery of the vapor to downstream components. By substantially maintaining the saturated vapor condition within the vaporizer tank the pressure of vapor at the mass flow controller can be substantially maintained and a stable and consistent flow rate of vapor achieved.

System and method for producing and delivering vapor

A system and method for regulating the temperature of a sensor to reduce temperature gradients that form within the sensor. In one embodiment, the temperature gradients are reduced utilizing a temperature regulator with two controlled zones that surround a variable capacitance sensor. Measurements are made for the ambient temperature of at least one of the two temperature controlled zones, and the temperature differential between the two temperature controlled zones. The temperature regulator then adjusts the temperature of the two controlled zones based upon this differential in order to minimize the existing temperature gradient.

Temperature regulator for use with a pressure sensing device

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Allen, TX, United States of America

Daryl Buchanan