Texas Instruments Corporation

Darrell R Krumme

Bhaskar Srinivasan

Abbas Ali

Guruvayurappan Mathur

Poornika Fernandes

Shariq Arshad

Shih-Chang Chang

Joao Sergio Afonso

In some examples, an integrated circuit includes an isolation layer disposed on or over a semiconductor substrate. The integrated circuit also includes a first conductive plate located over the isolation layer and a composite dielectric layer located over the first conductive plate. The composite dielectric layer includes a first sublayer comprising a first chemical composition; a second sublayer comprising a second different chemical composition; and a third sublayer comprising a third chemical composition substantially similar to the first chemical composition. The integrated circuit further includes a second conductive plate located directly on the composite dielectric layer above the first conductive plate.

Integrated circuits including composite dielectric layer

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Waxahachie, TX, United States of America

Darrell R Krumme