Infineon Technologies Ag

Darragh Francis Corrigan

Andreas Wiesbauer

Guangzhao Zhang

An adaptive MEMS device includes a MEMS microphone and integrated circuitry, wherein the integrated circuitry is electrically connected to the MEMS microphone. The integrated circuitry reads out an output signal from the MEMS microphone and provides the output signal or a rendered output signal, via a first integrated interface, to an external processing device. Additionally, the integrated circuitry determines, at run-time, diagnostic data on the current condition of the MEMS device and provides, at run-time, the diagnostic data, via a second integrated interface, to the external processing device.

Adaptive MEMS device, codec for use with the MEMS device and method for providing diagnostic data, at run-time, on the current condition of a MEMS device

A device for sensing a motion of a deflectable surface includes a deflectable element having a first side beam deflectable and includes a reflective surface at a second side of the deflectable element, proposing the first side. The device includes an optical emitter for emitting an optical signal towards the reflective surface and an optical receiver for receiving a reflected optical signal from the reflective surface and for providing a reception signal based on a reflective optical signal. The device includes a control unit in communication with the optical receiver for determining information related to the motion of the deflectable element based on the reception signal.

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Munich, Germany

Darragh Francis Corrigan