Credence Systems Corporation

Cisco Technology, Inc.

Dcg Systems Gmbh

Dario Meluzzi

Jonathan Frank

John Eric Hanson

Daniel Murdoch Cotton

Thomas Jeffrey Enderwick

A collection optics arrangement integrating an objective lens and a solid immersion lens. An objective lens housing has an objective lens mounted inside. A solid immersion lens (SIL) housing is slidably mounted onto said objective lens housing, and a solid immersion lens is mounted onto the SIL housing. A spring imparts resilient force resisting the sliding of the solid immersion lens housing with respect to the objective lens housing.

Collection optics integrating an objective and a SIL

A method and apparatus are provided for processing a data packet. Policy data that specifies nested encapsulation may be identified based upon one or more attributes of the data packet. Based upon first policy data that specifies two or more encapsulations to be applied to a data packet, second policy data may be generated that specifies nested encapsulation to be applied to the data packet.

Method and apparatus for generating and using nested encapsulation data

A landing system is provided for accurate placing of collection optics in a microscope. In one example, a solid immersion lens (SIL) is used for light collection, and the landing system is operated to place the SIL in contact with an IC. A proximity sensor is used for determining the SIL's position with respect to the IC. The arrangement is attached to a z-motion stage. During the placement procedure, the navigation is performed in steps and at each step the compression of the SIL is measured relative to its uncompressed state. When a measured compression exceeds a preset threshold, a SIL landing is recognized. In one example, after a landing is recognized, a further compression is imparted to the SIL in order to place the SIL in a focusing distance to the objective lens.

Optics landing system and method therefor

A landing system is provided for accurate placing of collection optics in a microscope. In one example, a solid immersion lens (SIL) is used for light collection, and the landing system is operated to place the SIL in contact with an IC. A proximity sensor is used for determining the SIL's position with respect to the IC. The proximity sensor is attached to a z-motion stage. During the placement procedure, the navigation is performed in steps and at each step the compression of the SIL is measured relative to its uncompressed state. When a measured compression exceeds a preset threshold, a SIL landing is recognized. In one example, after a landing is recognized, a further compression is imparted to the SIL in order to place the SIL in a focusing distance to the objective lens.

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Mountain View, CA, United States of America

Dario Meluzzi