British Telecommunications Public Limited Company

The Secretary of State for Defence in Her Britannic Majesty's Government

Dario M Frigo

Donald C Bradley

Marc M Faktor

Rodney H Moss

Kevin J Mackey

Anthony W Vere

Marc M Faktor, Deceased

A method of providing a reagent into a chemical process said provision being in the vapor phase and at a controlled mass flow rate wherein the method comprises:

Reagent source

A method for forming a layer of a Group II or III fluoride on a semiconductor substrate (e.g. as epitaxial insulating layer) comprising vaporizing a precursor (I), where M is Be, Ca, Sr, Ba or lanthanide, b and d are 0 or 1. A, B, C and D are independently (IIA) or (IIB), X being O, S, NR, PR where R is H, alkyl, perfluoroalkyl; Y is perfluoroalkyl, fluoroalkenyl, fluoroalkylamine or fluoroalkenylamine; Z is H, F, alkyl, perfluoroalkyl or perfluoroalkenyl; and then decomposing the precursor vapor to form M fluoride. A preferred precursor for calcium fluoride is calcium 1,1,1,5,5,5-hexafluor-2,4-pentanedione complex where b and d are 0.

Method of depositing metal fluoride

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Utrecht, Netherlands

Dario M Frigo