Ut-battelle, Inc.

Danny J King

Susan J Babinec

Beth Louise Armstrong

Claus Daniel

Jane Y Howe

David L Wood, Iii

Lonnie Curt Maxey

Adrian Stefan Sabau

Ralph B Dinwiddie

Edward Andrew Payzant

Nicole S Nembhard

Patrick L Hagans

A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material.

Characterization of dielectric materials

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Ann Arbor, MI, United States of America

Danny J King