Berkin B.v.

Dannis Michel Brouwer

Joost Conrad Lötters

Remco John Wiegerink

Robert Anton Brookhuis

Maarten Sytze Groen

Aditya Mehendale

Marcel Ronald Katerberg

Jarno Groenesteijn

Esken Meutstege

Lars Kristiansen

Marvin Ernst Eckhard Klein

Joost Conrad LÖTTERS

The invention relates to a fluid flow device (), comprising a system chip () having a substrate (), a flow channel () defined within said substrate, and a sensor unit () connected to said flow channel for determining a property of a fluid in said flow channel. Furthermore, a valve unit () is provided within said substrate, for regulating fluid flow through said flow channel. The valve unit comprises a valve chamber () defined within said substrate, and a valve member () that is movably arranged within the valve chamber. The flow channel has a connection channel part () defined within said substrate (), wherein said connection channel part is connected to said valve unit. Further, control means connected to said valve unit and said sensor unit are provided. The control means are arranged for controlling said valve unit based on signals obtained by said sensor unit.

Fluid flow device, comprising a valve unit, as well as method of manufacturing the same

The invention relates to a fluid flow regulator device, comprising a valve member and a valve seat arranged to be movable with respect to each other such that a fluid flow surface area defined by the valve member and the valve seat can be changed. Furthermore, sensor means are provided for measuring a capacitance related to at least a measure of the fluid flow surface area. According to the invention, the sensor means are arranged such that the capacitance measured is inversely proportional to the distance between the valve member and the valve seat. In an embodiment, a reference capacitance relating to fluid flow conditions is measured.

Fluid flow regulator device, comprising a valve member and a valve seat defining a fluid flow surface area, as well as method of using the same

A Coriolis flow sensor with at least one vibrating flow tube through which a medium flows, includes elements for exciting the tube, and optical detection element for determining the movements of one or several points of the tube based on the principle of reflection of a light beam against the photosensitive surface of a light sensor. The light beam is directed at the tube wall, at a layer provided on this wall, or at an element fastened against this wall, wherein elements for shaping the beam are arranged for making the convergence of the beam in the direction of movement of the tube associated with the Coriolis forces smaller than the convergence in the direction of movement of the tube associated with the excitation forces. The sensitivity in the detection of the small movements of the tube caused by the Coriolis forces is enhanced.

Coriolis flow sensor with optically reflective motion sensor

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Ruurlo, Netherlands

Dannis Michel Brouwer