Applied Materials Italia S.r.l.

Applied Materials, Inc.

Daniele Andreola

Marco Galiazzo

Andrea Baccini

Giorgio Cellere

Luigi De Santi

Daniele Gislon

Tommaso Vercesi

Davide Colla

Alvise Fecchio

Valentina Furin

Enrico Pasqualetto

Alessio Zanchettin

Alberto Emilio Ruffo

Christian Zorzi

A support device includes a substrate receiving region. The support device includes a support body shaped as a pattern having an array of openings. The support body is a sparse structure wherein a joint area of the openings of the array of openings is 40% or more of the area of the substrate receiving region. The support body includes one or more suction openings configured to be in fluid communication with a vacuum source arrangement.

Support device for supporting a substrate, method of processing a substrate and semiconductor substrate

A method of performing screen printing on a substrate used for the manufacture of a solar cell is provided. The method includes moving a print head over a screen by a first drive actuator to perform a printing stroke in a first direction. The method includes moving a material processing head in the first direction by a second drive actuator to perform a material processing stroke behind the print head. The print head is moved away from the material processing head by the first drive actuator during a distance increasing phase of the printing stroke to increase a separation distance between the print head and the material processing head.

Method of performing screen printing on a substrate used for the manufacture of a solar cell, controller and apparatus for performing same

Embodiments of the present invention provide an apparatus and method for processing substrates using a multiple screen printing chamber processing system that has an increased system throughput, improved system uptime, and improved device yield performance, while maintaining a repeatable and accurate screen printing process on the processed substrates. In one embodiment, the multiple screen printing chamber processing system is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material, and then processed in one or more subsequent processing chambers.

Next generation screen printing system

Growing community of inventors

Povegliano, Italy

Daniele Andreola