Stmicroelectronics S.r.l.

Daniela Barge

Ubaldo Mastromatteo

Antonio Fincato

Guido Chiaretti

Francesco Martini

Maurizio Lenzi

The invention relates to a process for manufacturing an integrated optical device. The method involves forming a silicon dioxide multilayer structure on a silicon substrate containing, in a first region a core layer of a waveguide of the optical device. The core includes an electromagnetic radiation inlet/outlet A trench in a second region of the multilayer structure adjacent said first region is formed by a an anisotropic etching, the trench including side walls and a bottom wall spaced from the Substrate. The method further involves forming a coating layer of the side walls and the bottom wall of the trench; defining an opening in the bottom wall by at least partially removing the coating layer in order to expose the lower silicon dioxide of the multilayer structure; performing an isotropic etch through said opening in order to remove, starting from the exposed silicon dioxide, the multilayer structure silicon dioxide until forming a recess in the multilayer structure having a first wall at least one essentially planar portion inclined relative to the substrate. Such inclined portion extends at least partially in the first region, and includes the inlet/outlet port.

Optical integrated device manufacturing process

The described integrated planar optical structure comprises a principal waveguide having a core and a cladding that define a first light path ad means sensitive to the light radiated into the cladding comprising at least one secondary waveguide having a core and a cladding that define a second light path. The secondary waveguide has an entry situated in the cladding of the principal waveguide at such a distance from the core of the latter as not to interfere with the propagation of the light along the first optical path and a core section that becomes greater in a first part from the entry onwards to collect the light energy radiated into the cladding. Also described are a system for monitoring the light energy emitted by a source and an optical attenuator that comprise the aforesaid optical structure.

Integrated optical structure sensitive to the energy radiated into the cladding of a planar lightwave circuit

An optical radiation coupling module includes a waveguide for the propagation of optical radiation, an optoelectronic device arranged on a substrate, and a mechanism for coupling the radiation between the waveguide and the optoelectronic device. The coupling mechanism includes a guiding element moulded and tapered in a radiation propagation direction.

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San Martino Siccomario, Italy

Daniela Barge