Veeco Ald Inc.

Daniel Yang

Sang In Lee

Daniel H Lee

Samuel S Pak

Jeong Ah Yoon

Seung Yeop Baek

Suk Yal Cha

Deposition of material is performed on a substrate by causing short-distance reciprocating motions of the substrate that improve uniformity of material on the substrate. A series of reactors for injecting material onto the substrate is arranged along the length of the substrate in a repeating manner. During each reciprocating motion, the susceptor moves a distance shorter than an entire length of the substrate. Portions of the substrate are injected with materials by a subset of reactors. Since the movement of the substrate is smaller, a linear deposition device including the susceptor may be made smaller.

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Cupertino, CA, United States of America

Daniel Yang