International Business Machines Corporation

Daniel Widmer

Chung H Lam

Gerhard Ingmar Meijer

Johannes Georg Bednorz

Rolf Allenspach

Richard Stutz

Urs T Duerig

Bernd W Gotsmann

Emanuel Loertscher

A method for operating the arrangement for a laboratory room confined by a floor, a ceiling and walls connecting the floor with the ceiling, including inducing an air flow from an air inlet through a platform to an air outlet in a substantially laminar fashion. The arrangement includes a main base suspended on the floor; a tool base arranged on the main base; a platform arranged around the tool base, wherein the platform is permeable for air, and the platform is suspended at the walls; the air inlet arranged below the platform; the air outlet arranged above the tool base; and air guides for directing an air flow upwards.

Operating an arrangement for a laboratory room

An arrangement for a laboratory room that is confined by a floor, a ceiling and walls connecting the floor with the ceiling, the arrangement comprises: a main base suspended on the floor; a tool base arranged on the main base; a platform arranged around the tool base, wherein the platform is permeable for air, and the platform is suspended at the walls; an air inlet arranged below the platform; an air outlet arranged above the tool base; and air guides for directing an air flow upwards at least partially parallel to the main base and/or the tool base.

Arrangement for a laboratory room

A microelectronic device or non-volatile resistance switching memory comprising the switching material for storing digital information. A process includes a step of depositing the switching material by a CMOS deposition technique at a temperature lower than 400&#xb0; C.

Non-volatile resistance switching memory

Processes, apparatus and systems for depositing a switching material that is switchable between conductivity states and where the states are persistent. The invention further relates to a microelectronic device or non-volatile resistance switching memory comprising the switching material for storing digital information. A process includes a step of depositing the switching material by a CMOS deposition technique at a temperature lower than 400&#xb0; C.

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Yorktown Heights, NY, United States of America

Daniel Widmer