Teledyne Dalsa B.v.

Teledyne Digital Imaging, Inc.

Daniel Verbugt

W J De Haan

Bryan Delodder

The present invention relates to an image sensor. More in particular, the present invention relates to an image sensor that comprises dose sensing pixels to sense an incident dose of photons. Such dose sensing can be used to trigger an image capturing process. A dose sensing pixel will act as a dose sensing pixel in a dose sensing mode of the sensor in dependence of a signal on a dose select line. The invention proposes a dose select line connecting unit for connecting dose select lines of a first stitching block among adjacent stitching blocks to a respective dose select line of a second stitching block among adjacent stitching blocks to prevent multiple dose sensing pixels in the same column of the matrix of pixels from being selected in the dose sensing mode.

Image sensor

The disclosed embodiments include an image sensor and a method to manufacture thereof. In one embodiment, the method includes forming a plurality of semiconductor slices having a uniform width, at least two of the semiconductor slices having different lengths, and each of the semiconductor slices having a slice edge defining a side of the semiconductor slice. The method further includes arranging the semiconductor slices to form a semi-rectangular shape defining boundaries of the image sensor, each of the semiconductor slices being disposed proximate to another semiconductor slice of the plurality of semiconductor slices. Forming each semiconductor slice includes forming a plurality of pixel arrays over the semiconductor slice, the pixel arrays having an approximately uniform pixel pitch, and forming a seal ring around the semiconductor slice, the seal ring enclosing the semiconductor slice and the pixel arrays of the semiconductor slice, and each semiconductor slice having a different seal ring.

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Helden, Netherlands

Daniel Verbugt