Vistec Semiconductor Systems Gmbh

Kla-tencor Mie Gmbh

Daniel Skiera

Detlef Michelsson

Ralf Friedrich

An image () of a disc-shaped object () is recorded, wherein the entire surface () is captured with a plurality of fields (). A difference image () is formed, by subtracting a reference from each field () of the surface () of the disc-shaped object (), and subject to a color transformation, wherein by a suitable choice of transformation signals in one channel are maximized, while at the same time undesired variations, caused by production, of the fields () are moved to a different channel. That combination of transformation and detection channel is chosen for which the largest number of pixels of a field () with the defect to be found are located outside the spread of the pixels of the respective field () on the surface () of the respective disc-shaped object () from production and provide the largest signals for the defect.

Method for inspection and detection of defects on surfaces of disc-shaped objects and computer system with a software product for carrying out the method

A method for optical inspection, detection and visualization of defects () on wafers () is disclosed, wherein at least one camera () acquires images of at least one portion () of the wafer () relative to a reference point () of the wafer (), and the Cartesian coordinates of the image data associated with the at least one portion () of the wafer () are transformed into polar coordinates.

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Langgoens, Germany

Daniel Skiera