Vat Holding Ag

Daniel Seitz

Florian Ehrne

Andreas Hofer

Martin Netzer

Christoph Böhm

Christof Bachmann

Harald Sonderegger

A valve system having a vacuum valve and a regulating unit is disclosed. The vacuum valve has a valve seat including a valve opening, a first seal surface, and a valve closure for closing the valve opening using a second seal surface. A drive unit coupled to the valve closure is designed to be adjusted to provide respective valve opening states. The regulating unit adjusts the valve opening state by actuating the drive unit based on a currently determined regulating variable and a target variable. The regulating unit has a checking function configured such that a series of states of the valve closure are detected as park of the regulating process, and the states are stored as current regulating data. The current regulating data is compared with specified target regulating data and process information is generated based on the comparison of the current and the target regulating data.

Vacuum valve system for a regulated operation of a vacuum process

A vacuum valve has a valve opening () that is surrounded by a valve seat (), a valve plate () that releases the valve opening () in an open state and rests against the valve seat () in a closed state, and a carrier unit () that supports the valve plate () and moves between a first position, in which the valve opening () is in the open state, and a second position. The valve plate () moves between a retracted position and an extended position. In the second position of the carrier unit () and in the extended position of the valve plate (), the valve opening () is in the closed state. In the retracted position, the valve plate () is supported against the carrier unit ().

Vacuum valve

A vacuum valve including a valve body with first and second valve openings, first and second closure elements attached to a valve rod, a longitudinally adjustable transmission piece attached to the valve rod that is adjustable from an open position into an intermediate position, and in a transverse adjustment direction from the intermediate position into a first closing position, and counter thereto into a second closing position. The transmission piece is connected to the valve body via a longitudinal stroke linear guide and a transverse stroke linear guide having a transverse stroke guide part which extends parallel to an oblique adjustment direction and a transverse stroke carriage displaceably guided thereon. To adjust the transmission piece from the intermediate position into the first or second closing position, the transverse stroke carriage is linearly displaceable in or counter to the oblique adjustment direction from a central position into a first or second press-on position.

A vacuum valve, having a valve seat including a valve opening (axis (A)), and a first sealing surface around the valve opening and defines a first sealing plane (E), having a valve disk with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane (E), additionally having a first coupling element, connected to the valve disk and comprising a receiving means and a drive unit coupled with the first coupling element and is configured to provide the valve disk adjustable from an open position to a closed position. The drive unit and the valve disk are configured to provide a fine control position, wherein the valve disk is tilted relative to the valve seat where Eand Eenclose a defined angle (&#x3b1;), and the seal abuts fully against one of the two sealing surfaces and in part against the other sealing surface.

Vacuum valve for controlling a flow and for interrupting a flow path

A vacuum gate valve includes a closure disk for gas-tight closing of an opening. A connecting rod with which the closure disk is coupled is linearly adjustable by means of a linear drive unit and the closure disk is thus displaceable between a position uncovering the opening and an intermediate position pushed over the opening. At least two limbs are pivotably mounted at one limb end on the back of the closure disk via a first joint and at the other limb end on a support via a second joint to press the closure disk into the closed position. The limbs, the back and the support form an articulated parallelogram. Each of the limbs forms, with the respective first and second joints, a common integral part which includes a resilient material, the first joint and the second joint being formed by a flexible section on the limb.

Vacuum gate valve having a limb element

The invention provides a vacuum gate valve for closing off an opening. The vacuum gate valve can have a valve plate that can be turned so that the alignment of the valve plate will adapt to a valve seat when the valve plate is pressed against the valve seat.

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Au, Switzerland

Daniel Seitz