Kla Tencor Corporation

Daniel Scott

Ilya Bezel

Anatoly Shchemelinin

Eliezer Rosengaus

Kenneth P Gross

Matthew Derstine

Anant Chimmalgi

Rudolf C Brunner

Lauren Wilson

Wei Zhao

Rajeev Patil

Jincheng Wang

Younus Vora

Chris Bragg

Erik Kim

Quang Giang

Cedric Lasfargues

An optical alignment system includes a LADAR sub-system including: a laser source and a probe configured to deliver probe illumination from the laser source to a first optical surface of the optical system and an additional optical surface of the optical system. The probe is further configured to receive a first measurement signal from the first optical surface and an additional measurement signal from the additional optical surface of the optical system. The system also includes a detector configured to receive a first combined signal and an additional combined signal from an optical coupling assembly. The system further include a controller configured to determine a relative distance between the first optical surface and the additional optical surface based on the first combined signal or the additional combined signal.

System and method for LADAR-based optic alignment and characterization

An illumination delivery system provides a spatially and angularly uniform shaped beam output with sufficient intensity to illuminate a sample surface for defect inspection. Light is transmitted through a shaped fiber optic bundle, a homogenizer, a diffuser, and an optional focusing optics system.

Illumination delivery system

Growing community of inventors

San Jose, CA, United States of America

Daniel Scott