Elemental Scientific, Inc.

Cetac Technologies, Inc.

Samsung Electronics Co., Ltd.

Sarasep, Inc.

Daniel R Wiederin

Tyler Yost

Austin Schultz

Kyle W Uhlmeyer

Jonathan Hein

David Diaz

Kevin Wiederin

Gary J Barrett

Nathan Saetveit

Jae Seok Lee

Kevin Hahn

Michael Paul Field

Beau A Marth

Jared Kaser

Stephen H Sudyka

Patrick Sullivan

Karl Hauke

Jae Min Kim

Paul Field

Jacob Unnerstall

Ross Coenen

Mark Casper

Connor Doolan

Brad Prucha

James W Harris

Guangwei Ji

Gary J Barret

Jianzhong Zhu

Scott Smith

Charles Derrick Quarles, Jr

Jeremiah Meints

Mason Spilinek

Cole J Nardini

Jaeyoung Kim

Sooyeon Kim

Douglas T Gjerde

So Young Kim

Jude Sakowski

Myung Hwan Kim

Min-Soo Suh

John E Sutton

Suyeon Jeong

Brianna Dufek

Ean Kiddoo

Daesung Kim

Junghee Shin

Alexander Lang

Michael Volkmar

Eric Radda

C Derrick Quarles, Jr

Systems and methods are described for controlling flow of a purge gas introduced to an ablation cell between samples to remove atmospheric gas. A system embodiment includes, but is not limited to, a spray chamber including a spray chamber body, a transfer gas inlet configured to receive gas from a laser ablation sample cell, a first outlet line configured to transfer gas from the spray chamber to an inductively-coupled plasma torch, and a second outlet line coupled to the spray chamber body, the second gas outlet having a larger internal cross-sectional area than an internal cross-sectional area of the first outlet line; and a valve fluidically coupled to the second outlet line, the valve configured to transition between at least an open configuration configured to permit transfer gas through the second outlet line and a closed configuration configured to prevent transfer of gas through the second outlet line.

Atmospheric purge system and method for laser ablation sample processing

An inductively coupled plasma (ICP) torch is described that includes an injector protector to shield an injector end. A system embodiment includes, but is not limited to, a tubular sample injector configured to receive an aerosolized sample in an interior defined by walls of the tubular sample injector; an injector protector surrounding at least a portion of the tubular sample injector; an inner tube surrounding at least a portion of the injector protector to form a first annular space between the inner tube and the injector protector, the inner tube defining at least one inlet port for introduction of an auxiliary gas into the first annular space; and an outer tube surrounding at least a portion of the inner tube to form a second annular space, the outer tube defining at least one inlet port for introduction of a cooling gas into the second annular space.

Inductively coupled plasma torch structure with protected injector

Systems and methods for iterative removal of outlier data from spectrometry data to determine one or more of a particle baseline and a detection threshold for nanoparticles are described. Ion signal intensity values that exceed an outlier threshold value associated with a sum of a first multiple of an average of the count distribution of ion signal intensity and a first multiple of a standard deviation of the count distribution of ion signal intensity are iteratively removed from the raw data set until no outliers remain, providing a background data set. A nanoparticle baseline intensity value is set as a sum of a second multiple of an average of the background data set and a second multiple of a standard deviation of the background data set to differentiate between signal intensity values that are associated with background interference and that are associated with the presence of nanoparticles in the sample.

Nanoparticle baseline and particle detection threshold determination through iterative outlier removal

Systems and methods are described to determine a prioritization schedule for samples handled by a system with multiple remote sampling systems. A system embodiment includes, but is not limited to, an analysis system at a first location; one or more remote sampling systems at remote from the first location, the one or more remote sampling systems configured to receive a liquid segment and transfer a liquid sample to the analysis system via a transfer line; and a controller communicatively coupled with the analysis system and the one or more remote sampling systems, the controller configured to assign a priority value to a sample for analysis by the analysis system and to manage a queue of samples received from at the one or more remote sampling systems on the basis of the assigned priority value.

System for prioritization of collecting and analyzing liquid samples

Systems and methods are described for transferring gas from an ablation cell to an inductively coupled plasma analysis system via a gas exchange membrane transfer line to exchange gas introduced to the ablation cell with a sweep gas. A system embodiment includes, but is not limited to, a laser ablation cell configured to generate a sample transfer stream through laser ablation of a sample and introduction of a carrier gas to flow the ablated sample from the laser ablation cell; an inductively-coupled plasma analysis device configured to measure one or more analytes in the sample transfer stream; and a gas exchange membrane transfer line fluidically coupled between the laser ablation cell and the inductively-coupled plasma analysis device, the gas exchange membrane transfer line configured to replace gas in the sample transfer stream with sweep gas via gas exchange across a membrane of the gas exchange membrane transfer line.

Membrane-based purge gas and sample transfer for laser ablation sample processing

Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.

System for collecting liquid samples

Systems and methods are described for integrated sample container cover removal and sample probe positioning. In an example implementation, an autosampler system includes, but is not limited to, a z-axis support rotatable about a z-axis of an autosampler deck; a sample probe support structure coupled to the z-axis support, the sample probe support structure configured to hold a sample probe to withdraw a fluid-containing sample held within a sample container supported by the autosampler deck; and a sample cap remover coupled to the z-axis support in an orientation that is rotationally offset from the z-axis support with respect to the sample probe support structure, the sample cap remover configured to lift a cap from the sample container to provide access to an interior of the sample container by the sample probe supported by the sample probe support structure.

Autosampler system with automated sample container cover removal and sample probe positioning

A sample identification system for an automated sampling device is described. A system embodiment includes, but is not limited to, a sample holder having a plurality of apertures configured to receive a plurality of sample vessels therein, the sample holder having one or more corresponding sample holder identifiers positioned proximate to the sample holder; and an identifier capture device configured to detect the one or more sample holder identifiers positioned proximate to the sample holder and generate a data signal in response thereto, the data signal corresponding to at least an orientation of the sample holder relative to a surface on which the sample holder is positioned.

Autosampler sample and sample rack identification

An inductively coupled plasma (ICP) torch is described that includes a tapered outer end. A system embodiment includes, but is not limited to, a tubular sample injector configured to receive an aerosolized sample in an interior defined by walls of the tubular sample injector; an inner tube surrounding at least a portion of the tubular sample injector to form a first annular space between the inner tube and the walls of the tubular sample injector, the inner tube defining at least one inlet port for introduction of an auxiliary gas into the first annular space; and an outer tube surrounding at least a portion of the inner tube to form a second annular space, the outer tube defining at least one inlet port for introduction of a cooling gas into the second annular space, the outer tube having a flared region at an outlet of the outer tube.

Inductively coupled plasma torch structure with flared outlet

An analysis system includes a degassing cell, at least one first valve, and at least one second valve. The at least one first valve is fluidly coupled with a top of the degassing cell, the at least one first valve configured selectably connect the degassing cell to a displacement gas flow and to a vacuum source. The at least one second valve is fluidly connected with a lateral side of the degassing cell and separately fluidly connected with a bottom of the degassing cell. The at least one second valve is selectably coupled with any of a source of a sample-carrying fluid, a transfer line configured to deliver a sample to an analysis device, or a waste output.

Automated inline preparation and degassing of volatile samples for inline analysis

Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

Systems for integrated decomposition and scanning of a semiconducting wafer

Systems and methods for analyzing ultra-low level concentration nanoparticles in semiconductor cleaning chemicals by single particle inductively coupled plasma mass spectrometry (spICP-MS) are described. In aspects, the methods described herein include determination factors that are specific to each of the chemical matrix and the type of analyte associated with the nanoparticles present in a fluid sample for both a particle baseline intensity value and a nanoparticle detection threshold.

Nanoparticle analysis for ultra-low level concentrations of nanoparticles in fluid samples

Systems and methods are described for isolating a sample at a valve prior to introduction to an analysis system, such as sample analysis via ICP-MS. A system embodiment can include, but is not limited to, a valve system including a first valve in fluid communication with a sample reservoir and a second valve configured to permit and block access of a vacuum source to the first valve; a sensor system configured to detect presence or absence of a fluid at the first valve; and a controller configured to control operation of the second valve to block access of the vacuum source to the first valve upon detection of the fluid at the first valve to isolate the fluid within the sample reservoir.

System and method for trapping fluid at a valve

An embodiment of an analysis system can include an initial multi-port valve, at least one intermediate multi-port valve, a further multi-port valve, and a time-of-flight mass spectrometer (TOF-MS). The initial multi-port valve can be configured to receive a sample. The at least one intermediate multi-port valve can be fluidly connected to the initial multi-port valve and configured to receive the sample from the initial multi-port valve. A given intermediate multi-port valve can have an ion-exchange column associated therewith. The given intermediate multi-port valve can be configured selectably to one of direct the sample through the ion-exchange column associated therewith (in a speciation mode) or bypass the ion-exchange column (in an infusion mode). The further multi-port valve can be fluidly connected with the at least one intermediate multi-port valve and configured to receive the sample from therefrom. The time-of-flight mass spectrometer (TOF-MS) can be fluidly connected to the further multi-port valve.

Automated system for online detection of organic molecular impurities in semiconductor grade chemicals

Growing community of inventors

Omaha, NE, United States of America

Daniel R Wiederin