Helix Technology Corporation

Brooks Automation Gmbh

Daniel R Jankins

John J Varone

Robert J Lepofsky

Robert P Sullivan

Joseph Chopy, Jr

Oliver J Dumas

Randall J McDonald

A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.

Cryopump network

A cryopump system includes an integral assembly having a refrigerator, cryopumping surfaces cooled by the refrigerator, a first electronic module for controlling the cryopump, and a second electronic module which is removably coupled to the first module. The second electronic module has a first surface abutting a complementary first surface of a housing of the first electronic module. Preferably, the first controller module has three orthogonal surfaces of approximately the same dimensions. Electronic modules can be removably coupled to each of the three surfaces. The cryopump system includes a module cap which is coupled to an end of an electronic module to shield electrical connections between two coupled electronic modules. The electronic modules comprise a channel of rectangular cross section having slots for mounting printed circuit boards.

Cryopump system with modular electronics

A vacuum network controller includes a host interface for interfacing with a host controller, a component interface for interfacing with vacuum system components, a computer-readable medium storing software code, and a processor in communication with each of the preceding elements. The software code generates commands to control the vacuum system components, translates those commands into multiple communication protocols, and communicates the translated commands to the component interface. In a method embedded in a set of computer-translatable instructions, an instruction is received from a host controller. That instruction is processed to generate a command for controlling a vacuum system component. A software driver is selected from a library of drivers for communication protocols, and the selected software driver is used to translate the command into the respective protocol. Finally, the translated command is communicated to a component interface to control the operation of the vacuum system component.

Vacuum network controller

Growing community of inventors

Raynham, MA, United States of America

Daniel R Jankins