Agency for Science, Technology and Research

Nanyang Technological University

Daniel Puiu Poenar

Victor Samper

Qasem Ramadan

Chen Yu

A method of forming, in or on a Si substrate, planar micro-coils with coil windings of high aspect ratio (&#x3e;3) and a wide variety of geometric shapes. The micro-coils may be formed on a Si substrate and be embedded in a dielectric, or they may be formed in trenches within a Si substrate. The micro-coils may have field enhancing ferromagnetic pillars rising above the micro-coil plane, formed at positions of maximum magnetic field strength and the micro-coils may also include magnetic layers formed beneath the substrate and contacting the pillars to form a substantially closed pathway for the magnetic flux. The substrate may be thinned to membrane proportions. These micro-coils produce strong magnetic fields with strong field gradients and can be used in a wide variety of processes that involve the exertion of strong magnetic forces at small distances or the creation of magnetic wells for trapping and manipulating small particles.

Growing community of inventors

Singapore, Singapore

Daniel Puiu Poenar