Credence Systems Corporation

Dcg Systems Gmbh

Optonics, Inc.

Daniel Murdoch Cotton

Jonathan Frank

James S Vickers

Nader Pakdaman

Thomas Wong

John Eric Hanson

Dario Meluzzi

A collection optics arrangement integrating an objective lens and a solid immersion lens. An objective lens housing has an objective lens mounted inside. A solid immersion lens (SIL) housing is slidably mounted onto said objective lens housing, and a solid immersion lens is mounted onto the SIL housing. A spring imparts resilient force resisting the sliding of the solid immersion lens housing with respect to the objective lens housing.

Collection optics integrating an objective and a SIL

A system for probe-less non-invasive detection of electrical signals from integrated circuit devices is disclosed. The system includes an illumination source, collection optics, imaging optics, and a photon sensor. In a navigation mode, the light source is activated and the imaging optics is used to identify the target area on the chip and appropriately position the collection optics. Once the collection optics is appropriately positioned, the light source is deactivated and the photon sensor is used to detect photons emitted from the chip. No mention of cooling (active device measurement capability) and advanced optics to detect the features (SIL).

Time resolved non-invasive diagnostics system

A system for orthogonal alignment of a specimen disclosed. The system includes a light-beam illumination source, collection optics, imaging optics, and a tiltable specimen holder. The light-beam source is activated to illuminate a spot on the specimen, and the imaging optics is used image that spot. The location of the spot on the imager is used to determine whether the specimen is orthogonal to the optical axis of the collection optics.

Light beam apparatus and method for orthogonal alignment of specimen

A landing system is provided for accurate placing of collection optics in a microscope. In one example, a solid immersion lens (SIL) is used for light collection, and the landing system is operated to place the SIL in contact with an IC. A proximity sensor is used for determining the SIL's position with respect to the IC. The arrangement is attached to a z-motion stage. During the placement procedure, the navigation is performed in steps and at each step the compression of the SIL is measured relative to its uncompressed state. When a measured compression exceeds a preset threshold, a SIL landing is recognized. In one example, after a landing is recognized, a further compression is imparted to the SIL in order to place the SIL in a focusing distance to the objective lens.

Optics landing system and method therefor

A landing system is provided for accurate placing of collection optics in a microscope. In one example, a solid immersion lens (SIL) is used for light collection, and the landing system is operated to place the SIL in contact with an IC. A proximity sensor is used for determining the SIL's position with respect to the IC. The proximity sensor is attached to a z-motion stage. During the placement procedure, the navigation is performed in steps and at each step the compression of the SIL is measured relative to its uncompressed state. When a measured compression exceeds a preset threshold, a SIL landing is recognized. In one example, after a landing is recognized, a further compression is imparted to the SIL in order to place the SIL in a focusing distance to the objective lens.

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Mountain View, CA, United States of America

Daniel Murdoch Cotton