Parker-hannifin Corporation

Daniel Morgan

William Ehlig

Thomas A Austin

Clay Nesbitt

Warner C Thelen

A valve assembly includes a valve body defining a valve passage and a valve seat disposed within the valve body. The valve assembly also includes a valve actuator moveable between a closed position in which the valve actuator is sealed against the valve seat to close the valve passage and an open position in which the valve actuator is spaced apart from the valve seat to open the valve passage. The valve assembly includes a valve seat retainer disposed within the valve body in contact with the valve seat. The valve seat retainer is configured to impart both an axial support force and a lateral support force on the valve seat to prevent extrusion of the valve seat when the valve actuator is sealed against the valve seat in the closed position.

Dual axis seat retainer

A pressure regulator including a body having an internal chamber and a thermal shield made of a material having a lower thermal conductivity than a material of the body for reducing heat transfer between the body and the fluid flowing into the internal chamber. By reducing heat transfer between the fluid and the body, the temperature of the components of the pressure regulator is increased to reduce failure of the components and the density of the fluid is increased to improve the flow capacity of the pressure regulator.

Pressure regulator

Modular valve manifold system including a distribution tube and at least one valve mounted on the tube. Each valve has a body with an external port disposed along one of a first and a second radial axis, and a throughbore disposed along the other one of the axes and configured to receive the tube coaxially therethrough. The body is formed of a first body portion and a second body portion. The first body portion has a first face with a first channel formed therein defining a first portion of the throughbore and configured to be mounted on a first side of the tube. The second body portion has a second face with a second channel formed therein defining a second portion of the throughbore and configured to be mounted on the second tube side.

Modular valve manifold system

A high cycle and speed valve () includes a body (), a valve seat () fixed within the body, and a diaphragm () that moves between a closed position in which the diaphragm is forced against the valve seat, and an open position in which the diaphragm is released from the valve seat. The valve seat includes a static section () that is secured within the body, and a dynamic section () that is compressed by the diaphragm when the diaphragm is in the closed position. The static section includes a radially extending flange () that is received in a recess () formed in the body to secure the static section in the body. The valve includes a body cavity relief space () into which the dynamic section compresses in the closed position. The valve further includes a cap () that has a dry film lubricant layer () that serves as a dry lubricant between the cap and the diaphragm.

High cycle and speed valve

A pressure regulator () including a body () having an internal chamber () and a thermal shield () made of a material having a lower thermal conductivity than a material of the body () for reducing heat transfer between the body () and the fluid flowing into the internal chamber (). By reducing heat transfer between the fluid and the body (), the temperature of the components of the pressure regulator () is increased to reduce failure of the components and the density of the fluid is increased to improve the flow capacity of the pressure regulator ().

A valve poppet () is provided for use in a regulator valve assembly () for regulating the pressure of a flowing gas through a gas flow pressure regulator (). The valve poppet is includes a valve disc () having a flexible portion () so as to permit upward and downward movement of a valve stem () in an axial direction. The valve disc may have an edge portion () that provides a preloading force to self-align the valve disc within a valve seat (), and axially constrain the motion of valve stem. The valve stem () may extend perpendicularly relative to the valve disc from a sealing portion (). The movement of the valve stem is axially constrained and results in upward and downward movement of the flexible portion when the valve is opened and closed. The flexible and end portions of the valve disc may be formed of a plurality of spiral arms for self-aligning and axially constraining the valve disc.

Self-aligning axially constrained regulator valve assembly

A gas supply system that is easily assembled and/or installed and includes an initially flexible clamping system that allows for the gas supply system to adapt to the gas components. As the assembly of the gas components is complete, the clamping system becomes rigid thereby securing the gas components to a support rail. The slide lock gas delivery system allows a gas system component bottom surface to establish the sealing plane for the inlet and outlet seals independently. The lateral spacing for the gas component mounting holes float during assembly to reduce the opportunity for misalignment.

Slide lock gas delivery system

A flow splitter () that is uniquely characterized by the use of two diaphragm valves in a single valve body that are arranged in opposition to one another. The diaphragm valves are coupled together for common movement by a coupler, such that the flow rate through respective outlets is a function of the position of either diaphragm valve. That is, the position of one valve is a function of the position of the other valve, and vice versa. With this construction a single actuator can control the ratio of total flow that will be delivered to each of two outlet ports. Moreover, such construction eliminates the need for thermal or pressure sensors and thus the drawbacks associated therewith.

Flow splitter

An internally isothermal control volume of a flow verification system for measuring gas pressure drop relative to time to calculate flow rate has a thermal reservoir provided therein. The thermal reservoir is de-coupled from ambient effects so that the temperature of the thermal reservoir will be driven to the gas temperature during steady state flow of gas through the known volume and during gas expansion, will transfer heat to maintain a contrast gas temperature for accurate gas flow rate calculation with minimal effect from external influence during the verification process.

Flow control apparatus and method with internally isothermal control volume for flow verification

The transient response of a tied diaphragm gas pressure regulator is improved by reducing breakaway friction of a regulator valve with respect to its cooperating valve seat. This is preferably achieved by reducing the lateral load of the valve against the valve seat while the regulator is in a functional mode. In a disclosed embodiment an asymmetrical compression spring applies a force asymmetrically with respect to the axis of the valve. A tool permits adjusting the asymmetry of this force for counterbalancing existing lateral forces on the valve. As a result, overshoot of the gas pressure of the regulator with respect to a set outlet pressure at the onset of flow through the regulator can be substantially reduced or eliminated. The time necessary for providing a stable outlet pressure with the regulator after the onset of flow can also be significantly reduced. A disclosed method and apparatus for delivering a process gas for the manufacture of semiconductor devices advantageously utilize the improved load balanced pressure regulator for more consistent results in the application of materials or elements from the gas to the wafers.

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Vacaville, CA, United States of America

Daniel Morgan