Iscar, Ltd.

Kla Tencor Corporation

Daniel Men

Gil Hecht

Michael Abramson

Philip Shaheen

Eitan Gonen

Gideon Drori

Igor Volkov

Oshri Amzaleg

Yaaqov Kisos

End effectors of reticle mechanical interface pods as well as reticle handling methods are provided, which handle the reticle by the end effector by applying a lateral force and/or a downward force on the reticle during the handling to fixate the reticle to at least two supports (e.g., at least four fingers) which are attached to at least two arms of the end effector and are configured to apply an upwards force on the reticle. Hence the reticle is fixated to the end effector and can be handled with higher accelerations and at a higher throughput than current methods. End effectors may have multiple fingers to fixate the reticle, and on more pushers may apply a downwards force to further fixate the reticle to the supports.

End effectors and reticle handling at a high throughput

A flexible coupling including two body members each having an internal flexible member to cooperate with a rotational shaft and an external connecting member interconnecting two body members with each other. In order to minimize the axial length of the coupling maintaining its high torsional rigidity but enabling for compensation of substantial shafts misalignments such as parallel, angular or skewed axial misalignment, the internal flexible member passes over the coupling axis forming cavities between the flexible member and internal walls of the external connecting member in a plane perpendicular to the coupling axis and is provided with at least one flexible section between the connecting member and the coupling axis, the flexible section being substantially parallel to the coupling axis.

Flexible coupling

A cutting tool of the sort used for deep hole drilling has a cutting head mounted on a shank. The cutting head is formed asymmetrically with respect to a longitudinal axis and has at least one cutting edge. The cutting head has guiding segments that extend from a forward end to a rear end of the cutting head. Each of the guiding segments has a guiding pad in the periphery thereof. A forward end of the guiding pad lies on a cylindrical envelope defined by the cutting diameter of the cutting tool. A rear engagement portion of the cutting head is engaged with a forward engagement portion of the shank. The cutting head is made from sintered carbide powders and the guiding pads are integrally formed with the cutting head.

Cutting tool

A rotary cutting tool having a longitudinal axis defining forward and rearward directions and a direction of rotation, includes a cutting head releasably mounted to a front end of a tool shank. The cutting head includes a cap portion and a rearwardly extending tail portion. The cap portion is provided with a plurality of head segments, each head segment having a rotationally leading end facing the direction of rotation and a rotationally trailing end. The trailing end of each head segment is provided with a locking member which extends in a direction opposite the direction of rotation. The tool shank has a forward end provided with a corresponding plurality of locking recesses opening out to the direction of rotation, and a shank pocket recess. In the assembled tool, the tail portion of the cutting head is received into the shank pocket recess and each of the plurality of locking members is received into a corresponding locking recess.

Rotary cutting tool having releasably mounted self-clamping cutting head with locking member

A deburring tool has a cutting insert slidably supported therein. The deburring cutting insert has a cylindrical major body and is moveable between a retracted position and an extended position by means of a biasing spring located alongside the cutting insert.

Deburring tool and cutting insert therefor

A rotary cutting tool comprising a solid cutting head mounted to a shank. The cutting head comprises a cutting portion adjacent a cutting head front face and a mounting portion integrally formed therewith and extending rearwardly therefrom. The shank comprises a receiving portion extending rearwardly from a shank front face. When the cutting head is secured to the shank, the mounting portion is received in the receiving portion, and the shank front face is forwardly exposed and adjacent the cutting head front face.

Cutting tool assembly and cutting head therefor

A deburring tool having an indexable cutting insert having four cutting edges. The cutting insert has a main body portion and a guide groove. The cutting insert is slidably retained in an insert pocket with the main body portion of the insert located in a generally rectangular slot of the insert pocket and with the guide groove located and engaging a guide member portion of the insert pocket. The cutting insert is moveable between a retracted position and an extended position by means of a spring which biases the cutting insert towards the extended position. The sliding movement of the cutting insert is performed by the sliding of the guide member within the guide groove.

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Haifa, Israel

Daniel Men