Robert Boschgmbh

Daniel Maier

Helmut Grutzeck

Andreas Finn

Joerg Muchow

Thorsten Balslink

Rainer Straub

Robert Wolf

Stefan Mark

Peter Sudy

Corinna Koepernik

An ESD protective device for a MEMS element is described as having at least one first line; at least one n-region connected to the first line; at least one insulating region connected to the n-region; at least one p-region connected to the insulating region; at least one second line connected to the p-region; the n-region, the insulating region, and the p-region being situated on a substrate.

ESD protection device for a MEMS element

A micromechanical component includes a micromirror connected to a mounting support via at least one spring such that the micromirror is adjustable about at least one axis of rotation relative to the mounting support, where the micromirror includes a reflective surface developed at least partially on a first diaphragm surface of a mounted diaphragm of the micromirror, the diaphragm including a second diaphragm surface that faces away from the first diaphragm surface and that is mounted in air or vacuum.

Micromechanical component and method for producing a micromechanical component

A micromirror device having a cap, a function layer, and a window layer, which are disposed on top of one another and parallel to a main extension plane, the function layer being situated between the cap and the window layer, and a micromirror is patterned out of the function layer. The micromirror device has a stop, which is designed to restrict a deflection of the micromirror in a direction perpendicular to the main extension plane.

Micromirror device having a mechanical stop

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Stuttgart, Germany

Daniel Maier